TY - GEN
T1 - Modeling growth behavior for Si1-xGex from SiH 4 and GeH4 by CVD
AU - Yang, X. L.
AU - Tao, M.
PY - 2006
Y1 - 2006
N2 - A kinetic model based on the collision theory of chemical reactions, statistical physics, and the concept of competitive adsorption is proposed for Si1-xGex growth from SiH4 and GeH4 by chemical vapor deposition. It takes into account both homogeneous and heterogeneous reactions, which involve the precursors (SiH4 and GeH4) and the homogeneous decomposition product of germane, germylene (GeH2), and three types surface sites, silicon sites, hydrogen-terminated silicon sites, and germanium sites. The growth of Si 1-xGex can be divided into two regimes: a heterogeneous decomposition dominated regime and a homogeneous decomposition dominated regime. Analytical equations are derived to quantitatively describe growth rate as a function of deposition conditions, including deposition temperature, silane flow rate, and germane flow rate, for the heterogeneous regime. Homogeneous decomposition of germane into germylene causes precursor depletion, and an empirical linear relation is employed to describe the growth behavior in the homogeneous regime. The model agrees well with the experimental data. Copyright The Electrochemical Society.
AB - A kinetic model based on the collision theory of chemical reactions, statistical physics, and the concept of competitive adsorption is proposed for Si1-xGex growth from SiH4 and GeH4 by chemical vapor deposition. It takes into account both homogeneous and heterogeneous reactions, which involve the precursors (SiH4 and GeH4) and the homogeneous decomposition product of germane, germylene (GeH2), and three types surface sites, silicon sites, hydrogen-terminated silicon sites, and germanium sites. The growth of Si 1-xGex can be divided into two regimes: a heterogeneous decomposition dominated regime and a homogeneous decomposition dominated regime. Analytical equations are derived to quantitatively describe growth rate as a function of deposition conditions, including deposition temperature, silane flow rate, and germane flow rate, for the heterogeneous regime. Homogeneous decomposition of germane into germylene causes precursor depletion, and an empirical linear relation is employed to describe the growth behavior in the homogeneous regime. The model agrees well with the experimental data. Copyright The Electrochemical Society.
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U2 - 10.1149/1.2195667
DO - 10.1149/1.2195667
M3 - Conference contribution
AN - SCOPUS:33745459024
SN - 156677439X
SN - 9781566774390
T3 - ECS Transactions
SP - 299
EP - 309
BT - Silicon Materials Science and Technology X
PB - Electrochemical Society Inc.
T2 - 10th International Symposium on Silicon Materials Science and Technology - 209th Meeting of the Electrochemical Society
Y2 - 7 May 2006 through 12 May 2006
ER -