Modeling and dynamic characterization of the czochralski crystal growth process

M. A. Gevelber, George Stephanopoulos

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A lumped parameter model of the Czochralski crystal growth process is proposed that captures the dominant nonlinear dynamics, internal coupling, and disturbance structure. Conventional and advanced actuators are modeled. The dynamic characteristics of the interface shape and input/outputs that limit the achievable controller performance are identified.

Original languageEnglish (US)
Pages (from-to)109-114
Number of pages6
JournalJournal of Dynamic Systems, Measurement and Control, Transactions of the ASME
Volume115
Issue number1
DOIs
StatePublished - Jan 1 1993
Externally publishedYes

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Crystal growth from melt
dynamic characteristics
crystal growth
controllers
disturbances
actuators
output
Actuators
Controllers

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Information Systems
  • Instrumentation
  • Mechanical Engineering
  • Computer Science Applications

Cite this

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