Abstract
A lumped parameter model of the Czochralski crystal growth process is proposed that captures the dominant nonlinear dynamics, internal coupling, and disturbance structure. Conventional and advanced actuators are modeled. The dynamic characteristics of the interface shape and input/outputs that limit the achievable controller performance are identified.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 109-114 |
| Number of pages | 6 |
| Journal | Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME |
| Volume | 115 |
| Issue number | 1 |
| DOIs | |
| State | Published - Mar 1993 |
| Externally published | Yes |
ASJC Scopus subject areas
- Control and Systems Engineering
- Information Systems
- Instrumentation
- Mechanical Engineering
- Computer Science Applications