TY - GEN
T1 - Micropillar sensing element for bio-inspired flow sensors
AU - Tao, J.
AU - Yu, X.
AU - Berilla, J.
PY - 2011/12/1
Y1 - 2011/12/1
N2 - This paper describes the efforts toward the development of bio-inspired flow sensor. Anatomy study has indicated a basic transduction element is the hairy structure. This study describes the fabrication of sensing element that emulates the mechano-electrical transduction mechanism. Different transduction element designs were investigated. Especially, the hairy structure made of the SDW method not only produces transduction component for mechano-electrical coupling, it is also rugged, sensitive and fracture resistant. The hairy structure also features directional sensitivity which could be used for acoustic field direction determination. The hairy structure is being further refined and will ultimately be integrated into develop bio-inspired flow sensors.
AB - This paper describes the efforts toward the development of bio-inspired flow sensor. Anatomy study has indicated a basic transduction element is the hairy structure. This study describes the fabrication of sensing element that emulates the mechano-electrical transduction mechanism. Different transduction element designs were investigated. Especially, the hairy structure made of the SDW method not only produces transduction component for mechano-electrical coupling, it is also rugged, sensitive and fracture resistant. The hairy structure also features directional sensitivity which could be used for acoustic field direction determination. The hairy structure is being further refined and will ultimately be integrated into develop bio-inspired flow sensors.
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M3 - Conference contribution
AN - SCOPUS:84866691467
SN - 9781605950532
T3 - Structural Health Monitoring 2011: Condition-Based Maintenance and Intelligent Structures - Proceedings of the 8th International Workshop on Structural Health Monitoring
SP - 1732
EP - 1739
BT - Structural Health Monitoring 2011
T2 - 8th International Workshop on Structural Health Monitoring 2011: Condition-Based Maintenance and Intelligent Structures
Y2 - 13 September 2011 through 15 September 2011
ER -