Micromachined accelerometers for inertial navigation applications

Junseok Chae; Haluk Kulah; Khalil Najafi

doi:10.4271/2005-01-1898

Micromachined accelerometers for inertial navigation applications

Junseok Chae, Haluk Kulah, Khalil Najafi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents research at The University of Michigan on micromachined accelerometers and their interface electronics to satisfy the requirements for inertial navigation applications. The accelerometer systems developed employ in-plane (lateral), out-of-plane (z-axis), and single-chip 3-axis sensors with the interface electronics. The interface electronics forms a second-order electromechanical sigma-delta modulator together with the sensor and the system can be operated in both open and closed-loop. These devices can achieve better than 2μg/√Hz resolution with a range of ±1.35g.

Original language	English (US)
Title of host publication	SAE Technical Papers
DOIs	https://doi.org/10.4271/2005-01-1898
State	Published - 2005
Externally published	Yes
Event	2005 SAE World Congress - Detroit, MI, United States Duration: Apr 11 2005 → Apr 14 2005

Other

Other	2005 SAE World Congress
Country/Territory	United States
City	Detroit, MI
Period	4/11/05 → 4/14/05

ASJC Scopus subject areas

Automotive Engineering
Safety, Risk, Reliability and Quality
Pollution
Industrial and Manufacturing Engineering

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10.4271/2005-01-1898

Cite this

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title = "Micromachined accelerometers for inertial navigation applications",

abstract = "This paper presents research at The University of Michigan on micromachined accelerometers and their interface electronics to satisfy the requirements for inertial navigation applications. The accelerometer systems developed employ in-plane (lateral), out-of-plane (z-axis), and single-chip 3-axis sensors with the interface electronics. The interface electronics forms a second-order electromechanical sigma-delta modulator together with the sensor and the system can be operated in both open and closed-loop. These devices can achieve better than 2μg/√Hz resolution with a range of ±1.35g.",

author = "Junseok Chae and Haluk Kulah and Khalil Najafi",

year = "2005",

doi = "10.4271/2005-01-1898",

language = "English (US)",

booktitle = "SAE Technical Papers",

note = "2005 SAE World Congress ; Conference date: 11-04-2005 Through 14-04-2005",

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AU - Chae, Junseok

AU - Kulah, Haluk

AU - Najafi, Khalil

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N2 - This paper presents research at The University of Michigan on micromachined accelerometers and their interface electronics to satisfy the requirements for inertial navigation applications. The accelerometer systems developed employ in-plane (lateral), out-of-plane (z-axis), and single-chip 3-axis sensors with the interface electronics. The interface electronics forms a second-order electromechanical sigma-delta modulator together with the sensor and the system can be operated in both open and closed-loop. These devices can achieve better than 2μg/√Hz resolution with a range of ±1.35g.

AB - This paper presents research at The University of Michigan on micromachined accelerometers and their interface electronics to satisfy the requirements for inertial navigation applications. The accelerometer systems developed employ in-plane (lateral), out-of-plane (z-axis), and single-chip 3-axis sensors with the interface electronics. The interface electronics forms a second-order electromechanical sigma-delta modulator together with the sensor and the system can be operated in both open and closed-loop. These devices can achieve better than 2μg/√Hz resolution with a range of ±1.35g.

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DO - 10.4271/2005-01-1898

M3 - Conference contribution

BT - SAE Technical Papers

T2 - 2005 SAE World Congress

Y2 - 11 April 2005 through 14 April 2005

ER -

Micromachined accelerometers for inertial navigation applications

Abstract

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