Method for Manufacturing Ultrathin Inorganic Membranes

A. J. Burggraaf (Inventor), Y. S. Lin (Inventor)

Research output: Patent

Original languageEnglish
Patent number5,160,618
Publication statusPublished - Nov 3 1992

Cite this

Burggraaf, A. J., & Lin, Y. S. (1992). Method for Manufacturing Ultrathin Inorganic Membranes. (Patent No. 5,160,618).