| Original language | English |
|---|---|
| Patent number | 5,160,618 |
| State | Published - Nov 3 1992 |
Method for Manufacturing Ultrathin Inorganic Membranes
A. J. Burggraaf (Inventor), Y. S. Lin (Inventor)
Research output: Patent
A. J. Burggraaf (Inventor), Y. S. Lin (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| Patent number | 5,160,618 |
| State | Published - Nov 3 1992 |