Method for Manufacturing Ultrathin Inorganic Membranes

A. J. Burggraaf (Inventor), Y. S. Lin (Inventor)

Research output: Patent

Original languageEnglish
Patent number050049
StatePublished - Jul 7 1993

Cite this

Burggraaf, A. J., & Lin, Y. S. (1993). Method for Manufacturing Ultrathin Inorganic Membranes. (Patent No. 050049).