MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films

Jong H. Han; Jagannathan Rajagopalan; M. Taher A. Saif

doi:10.1117/12.706115

MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films

Jong H. Han, Jagannathan Rajagopalan, M. Taher A. Saif

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

11 Scopus citations

Abstract

We have developed a MEMS-based testing stage that can quantitatively characterize both the electrical and mechanical properties of nanocrystalline metal films. This stage, which is SEM and TEM compatible, is a modified version of an earlier MEMS-based tensile testing stage (M. A. Haque and M. T. A. Saif, Proc. Natl. Acad Sci., 101(17), 6335-6340 (2004)). This modified stage requires a simpler fabrication procedure, involving less lithography and etching steps, and has higher sample yield compared to the earlier version. It allows for 4-point electrical resistivity measurement, and insitu tensile testing in SEM and TEM of free-standing nano-scale metal films. The stage was used to perform a tensile test and electrical resistivity measurement on 100-nm-thick aluminum films, the results of which are described.

Original language	English (US)
Title of host publication	MEMS/MOEMS Components and Their Applications IV
DOIs	https://doi.org/10.1117/12.706115
State	Published - May 22 2007
Externally published	Yes
Event	MEMS/MOEMS Components and Their Applications IV - San Jose, CA, United States Duration: Jan 22 2007 → Jan 23 2007

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6464
ISSN (Print)	0277-786X

Other

Other	MEMS/MOEMS Components and Their Applications IV
Country/Territory	United States
City	San Jose, CA
Period	1/22/07 → 1/23/07

Keywords

Aluminum
Electrical resistivity
In-situ uniaxial tensile
MEMS
Nanocrystalline
SEM
TEM

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.706115

Cite this

MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films. / Han, Jong H.; Rajagopalan, Jagannathan; Saif, M. Taher A.
MEMS/MOEMS Components and Their Applications IV. 2007. 64640C (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6464).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Han, JH, Rajagopalan, J & Saif, MTA 2007, MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films. in MEMS/MOEMS Components and Their Applications IV., 64640C, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6464, MEMS/MOEMS Components and Their Applications IV, San Jose, CA, United States, 1/22/07. https://doi.org/10.1117/12.706115

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abstract = "We have developed a MEMS-based testing stage that can quantitatively characterize both the electrical and mechanical properties of nanocrystalline metal films. This stage, which is SEM and TEM compatible, is a modified version of an earlier MEMS-based tensile testing stage (M. A. Haque and M. T. A. Saif, Proc. Natl. Acad Sci., 101(17), 6335-6340 (2004)). This modified stage requires a simpler fabrication procedure, involving less lithography and etching steps, and has higher sample yield compared to the earlier version. It allows for 4-point electrical resistivity measurement, and insitu tensile testing in SEM and TEM of free-standing nano-scale metal films. The stage was used to perform a tensile test and electrical resistivity measurement on 100-nm-thick aluminum films, the results of which are described.",

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N2 - We have developed a MEMS-based testing stage that can quantitatively characterize both the electrical and mechanical properties of nanocrystalline metal films. This stage, which is SEM and TEM compatible, is a modified version of an earlier MEMS-based tensile testing stage (M. A. Haque and M. T. A. Saif, Proc. Natl. Acad Sci., 101(17), 6335-6340 (2004)). This modified stage requires a simpler fabrication procedure, involving less lithography and etching steps, and has higher sample yield compared to the earlier version. It allows for 4-point electrical resistivity measurement, and insitu tensile testing in SEM and TEM of free-standing nano-scale metal films. The stage was used to perform a tensile test and electrical resistivity measurement on 100-nm-thick aluminum films, the results of which are described.

AB - We have developed a MEMS-based testing stage that can quantitatively characterize both the electrical and mechanical properties of nanocrystalline metal films. This stage, which is SEM and TEM compatible, is a modified version of an earlier MEMS-based tensile testing stage (M. A. Haque and M. T. A. Saif, Proc. Natl. Acad Sci., 101(17), 6335-6340 (2004)). This modified stage requires a simpler fabrication procedure, involving less lithography and etching steps, and has higher sample yield compared to the earlier version. It allows for 4-point electrical resistivity measurement, and insitu tensile testing in SEM and TEM of free-standing nano-scale metal films. The stage was used to perform a tensile test and electrical resistivity measurement on 100-nm-thick aluminum films, the results of which are described.

KW - Aluminum

KW - Electrical resistivity

KW - In-situ uniaxial tensile

KW - MEMS

KW - Nanocrystalline

KW - SEM

KW - TEM

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MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films

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Keywords

ASJC Scopus subject areas

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