Mechanical properties of indium tin oxide on polyethylene napthalate substrate

S. Bhagat, Y. Zoo, H. Han, J. Lewis, S. Grego, K. Lee, S. Iyer, Terry Alford

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work investigates the mechanical properties of indium tin oxide deposited on polyethylene napthalate substrates by rf sputtering method as a function of deposition conditions, including rf power, substrate temperature, and substrate treatment. X-ray diffraction analysis, Rutherford backscattering spectrometry and mechanical bending analysis are used for characterization of samples. The best mechanical performance represented by bending of the film stack is obtained from high substrate temperature and low rf power. Plasma treatment gases also influence mechanical properties, with mixture of nitrogen and hydrogen gases producing the best results. This work provides an initial understanding of the impact of sputter process conditions on film's mechanical performance.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
Pages401-406
Number of pages6
Volume1012
StatePublished - 2007
Event2007 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 9 2007Apr 13 2007

Other

Other2007 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/9/074/13/07

Fingerprint

Polyethylene
Tin oxides
indium oxides
Indium
tin oxides
Polyethylenes
polyethylenes
mechanical properties
Mechanical properties
Substrates
Gases
Rutherford backscattering spectroscopy
gases
X ray diffraction analysis
Spectrometry
Sputtering
Hydrogen
backscattering
Nitrogen
sputtering

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Bhagat, S., Zoo, Y., Han, H., Lewis, J., Grego, S., Lee, K., ... Alford, T. (2007). Mechanical properties of indium tin oxide on polyethylene napthalate substrate. In Materials Research Society Symposium Proceedings (Vol. 1012, pp. 401-406)

Mechanical properties of indium tin oxide on polyethylene napthalate substrate. / Bhagat, S.; Zoo, Y.; Han, H.; Lewis, J.; Grego, S.; Lee, K.; Iyer, S.; Alford, Terry.

Materials Research Society Symposium Proceedings. Vol. 1012 2007. p. 401-406.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bhagat, S, Zoo, Y, Han, H, Lewis, J, Grego, S, Lee, K, Iyer, S & Alford, T 2007, Mechanical properties of indium tin oxide on polyethylene napthalate substrate. in Materials Research Society Symposium Proceedings. vol. 1012, pp. 401-406, 2007 MRS Spring Meeting, San Francisco, CA, United States, 4/9/07.
Bhagat S, Zoo Y, Han H, Lewis J, Grego S, Lee K et al. Mechanical properties of indium tin oxide on polyethylene napthalate substrate. In Materials Research Society Symposium Proceedings. Vol. 1012. 2007. p. 401-406
Bhagat, S. ; Zoo, Y. ; Han, H. ; Lewis, J. ; Grego, S. ; Lee, K. ; Iyer, S. ; Alford, Terry. / Mechanical properties of indium tin oxide on polyethylene napthalate substrate. Materials Research Society Symposium Proceedings. Vol. 1012 2007. pp. 401-406
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