Abstract
This work investigates the mechanical properties of indium tin oxide deposited on polyethylene napthalate substrates by rf sputtering method as a function of deposition conditions, including rf power, substrate temperature, and substrate treatment. X-ray diffraction analysis, Rutherford backscattering spectrometry and mechanical bending analysis are used for characterization of samples. The best mechanical performance represented by bending of the film stack is obtained from high substrate temperature and low rf power. Plasma treatment gases also influence mechanical properties, with mixture of nitrogen and hydrogen gases producing the best results. This work provides an initial understanding of the impact of sputter process conditions on film's mechanical performance.
| Original language | English (US) |
|---|---|
| Title of host publication | Materials Research Society Symposium Proceedings |
| Pages | 401-406 |
| Number of pages | 6 |
| Volume | 1012 |
| State | Published - 2007 |
| Event | 2007 MRS Spring Meeting - San Francisco, CA, United States Duration: Apr 9 2007 → Apr 13 2007 |
Other
| Other | 2007 MRS Spring Meeting |
|---|---|
| Country | United States |
| City | San Francisco, CA |
| Period | 4/9/07 → 4/13/07 |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Materials Science(all)
- Condensed Matter Physics
- Mechanical Engineering
- Mechanics of Materials
Cite this
Mechanical properties of indium tin oxide on polyethylene napthalate substrate. / Bhagat, S.; Zoo, Y.; Han, H.; Lewis, J.; Grego, S.; Lee, K.; Iyer, S.; Alford, Terry.
Materials Research Society Symposium Proceedings. Vol. 1012 2007. p. 401-406.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Mechanical properties of indium tin oxide on polyethylene napthalate substrate
AU - Bhagat, S.
AU - Zoo, Y.
AU - Han, H.
AU - Lewis, J.
AU - Grego, S.
AU - Lee, K.
AU - Iyer, S.
AU - Alford, Terry
PY - 2007
Y1 - 2007
N2 - This work investigates the mechanical properties of indium tin oxide deposited on polyethylene napthalate substrates by rf sputtering method as a function of deposition conditions, including rf power, substrate temperature, and substrate treatment. X-ray diffraction analysis, Rutherford backscattering spectrometry and mechanical bending analysis are used for characterization of samples. The best mechanical performance represented by bending of the film stack is obtained from high substrate temperature and low rf power. Plasma treatment gases also influence mechanical properties, with mixture of nitrogen and hydrogen gases producing the best results. This work provides an initial understanding of the impact of sputter process conditions on film's mechanical performance.
AB - This work investigates the mechanical properties of indium tin oxide deposited on polyethylene napthalate substrates by rf sputtering method as a function of deposition conditions, including rf power, substrate temperature, and substrate treatment. X-ray diffraction analysis, Rutherford backscattering spectrometry and mechanical bending analysis are used for characterization of samples. The best mechanical performance represented by bending of the film stack is obtained from high substrate temperature and low rf power. Plasma treatment gases also influence mechanical properties, with mixture of nitrogen and hydrogen gases producing the best results. This work provides an initial understanding of the impact of sputter process conditions on film's mechanical performance.
UR - http://www.scopus.com/inward/record.url?scp=38549124929&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=38549124929&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:38549124929
SN - 9781558999725
VL - 1012
SP - 401
EP - 406
BT - Materials Research Society Symposium Proceedings
ER -