Maximizing step coverage during blanket tungsten low pressure chemical vapor deposition

Engineering & Materials Science

• Low pressure chemical vapor deposition 100%
• Deposition rates 78%
• Tungsten 66%
• Availability 43%
• Reactor operation 42%
• Silanes 39%
• Partial pressure 36%
• Hydrogen 24%
• Flow rate 23%

Physics & Astronomy

• blankets 69%
• tungsten 52%
• low pressure 51%
• vapor deposition 47%
• reactors 46%
• pressure ratio 38%
• wafers 30%
• availability 20%
• mouth 13%
• silanes 11%
• partial pressure 9%
• unity 9%
• flow velocity 8%
• hydrogen 6%
• approximation 5%

Chemical Compounds

• Low Pressure Chemical Vapour Deposition 89%
• Tungsten 56%
• Pressure 35%
• Partial Pressure 29%
• Silane 29%
• Reduction 27%
• Flow Kinetics 23%
• Hydrogen 15%
• Liquid Film 14%
• Surface 9%