Lateral field excitation film bulk acoustic resonator as infrared sensor

Xiaotun Qiu, Rui Tang, Jie Zhu, Hongyu Yu, Ziyu Wang, Jon Oiler

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper investigated an infrared (IR) sensitive Lateral Field Excitation (LFE) Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the LFE FBAR decreased when there was IR (peak wavelength at 750nm) illumination on the device. A linear relationship between the resonant frequency and the IR intensity was obtained with a detection limit of 9 μW/mm2. The sensing mechanism is attributed to the fact that the Young's modulus of the resonator material (ZnO) depends on temperature. In general, for a resonator operating in a bulk mode, a change in the Young's modulus translates into a shift of the resonant frequency. Thus, the sensitivity of the FBAR relies on its temperature coefficient of resonant frequency (TCF). Thickness Field Excitation (TFE) FBAR possessed a larger TCF. However, it showed a lower sensitivity to IR compared with the LFE FBAR. This was due to the reflection of IR radiation from the top electrode on the TFE FBAR.

Original languageEnglish (US)
Title of host publicationProceedings of IEEE Sensors
Pages623-626
Number of pages4
DOIs
StatePublished - 2010
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: Nov 1 2010Nov 4 2010

Other

Other9th IEEE Sensors Conference 2010, SENSORS 2010
CountryUnited States
CityWaikoloa, HI
Period11/1/1011/4/10

Fingerprint

Acoustic resonators
Natural frequencies
Infrared radiation
Sensors
Resonators
Elastic moduli
Temperature
Lighting
Wavelength
Electrodes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Qiu, X., Tang, R., Zhu, J., Yu, H., Wang, Z., & Oiler, J. (2010). Lateral field excitation film bulk acoustic resonator as infrared sensor. In Proceedings of IEEE Sensors (pp. 623-626). [5690426] https://doi.org/10.1109/ICSENS.2010.5690426

Lateral field excitation film bulk acoustic resonator as infrared sensor. / Qiu, Xiaotun; Tang, Rui; Zhu, Jie; Yu, Hongyu; Wang, Ziyu; Oiler, Jon.

Proceedings of IEEE Sensors. 2010. p. 623-626 5690426.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Qiu, X, Tang, R, Zhu, J, Yu, H, Wang, Z & Oiler, J 2010, Lateral field excitation film bulk acoustic resonator as infrared sensor. in Proceedings of IEEE Sensors., 5690426, pp. 623-626, 9th IEEE Sensors Conference 2010, SENSORS 2010, Waikoloa, HI, United States, 11/1/10. https://doi.org/10.1109/ICSENS.2010.5690426
Qiu X, Tang R, Zhu J, Yu H, Wang Z, Oiler J. Lateral field excitation film bulk acoustic resonator as infrared sensor. In Proceedings of IEEE Sensors. 2010. p. 623-626. 5690426 https://doi.org/10.1109/ICSENS.2010.5690426
Qiu, Xiaotun ; Tang, Rui ; Zhu, Jie ; Yu, Hongyu ; Wang, Ziyu ; Oiler, Jon. / Lateral field excitation film bulk acoustic resonator as infrared sensor. Proceedings of IEEE Sensors. 2010. pp. 623-626
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