Laser micromachining of thin-film polyimide microelectrode arrays: Alternative processes to photolithography

Hsiang Lan Yeh, Jonathan V. Garich, Ian R. Akamine, Jennifer M. Blain-Christen, Seth A. Hara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Thin-film microelectrode arrays have a wide variety of applications in research and medical devices. Conventionally, these arrays are fabricated through the use of photolithography, which can be problematic for innovative medical device fabrication due to long process times, inflexibility to design changes, and the reliance on potentially harmful chemicals. Here, we present the use of laser micromachining as an alternative to photolithography processes to fabricate thin-film polyimide microelectrode arrays. This fabrication method lends itself to an iterative design process as it can reduce fabrication steps and is attractive for medical devices since it can be used without harmful chemicals. Several process parameters were explored and the performance of the fabricated electrodes was compared to similar electrodes that were fabricated with conventional photolithography processes.

Original languageEnglish (US)
Title of host publicationFrontiers in Biomedical Devices, BIOMED - 2020 Design of Medical Devices Conference, DMD 2020
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791883549
DOIs
StatePublished - 2020
Event2020 Design of Medical Devices Conference, DMD 2020 - Minneapolis, United States
Duration: Apr 6 2020Apr 9 2020

Publication series

NameFrontiers in Biomedical Devices, BIOMED - 2020 Design of Medical Devices Conference, DMD 2020

Conference

Conference2020 Design of Medical Devices Conference, DMD 2020
Country/TerritoryUnited States
CityMinneapolis
Period4/6/204/9/20

Keywords

  • Femtosecond laser
  • Microfabrication
  • Polyimide
  • Thin-film microelectrode array

ASJC Scopus subject areas

  • Biomedical Engineering

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