Kalman filtering process control scheme with an application in semiconductor short run manufacturing

Enrique Del Castillo, Douglas Montgomery

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

A quality control chart for monitoring a short run process during the start-up phase is presented in this article. The chart is based on the Kalman filter recursive equations being applied to a stable process where the process variance is unknown prior to the start of the production run. The run length properties of this control scheme are discussed. It is shown that for the proposed scheme the run length properties are independent of the unknown process variance and that these properties are appropriate for monitoring a stable process during start-up. An economic model for the optimal design of the control scheme is presented and illustrated with a wet etching process used in semiconductor manufacturing.

Original languageEnglish (US)
Pages (from-to)101-105
Number of pages5
JournalQuality and Reliability Engineering International
Volume11
Issue number2
StatePublished - Mar 1995

Fingerprint

Process control
Semiconductor materials
Wet etching
Monitoring
Kalman filters
Quality control
Economics
Manufacturing
Semiconductors
Kalman filtering
Short-run
Optimal design
Control charts
Start-up

ASJC Scopus subject areas

  • Management Science and Operations Research
  • Engineering (miscellaneous)

Cite this

Kalman filtering process control scheme with an application in semiconductor short run manufacturing. / Del Castillo, Enrique; Montgomery, Douglas.

In: Quality and Reliability Engineering International, Vol. 11, No. 2, 03.1995, p. 101-105.

Research output: Contribution to journalArticle

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