A kalman filtering process control scheme with an application in semiconductor short run manufacturing

Enrique Del Castillo, Douglas Montgomery

Research output: Contribution to journalArticle

11 Scopus citations

Abstract

A quality control chart for monitoring a short run process during the start‐up phase is presented in this article. The chart is based on the Kalman filter recursive equations being applied to a stable process where the process variance is unknown prior to the start of the production run. The run length properties of this control scheme are discussed. It is shown that for the proposed scheme the run length properties are independent of the unknown process variance and that these properties are appropriate for monitoring a stable process during start‐up. An economic model for the optimal design of the control scheme is presented and illustrated with a wet etching process used in semiconductor manufacturing.

Original languageEnglish (US)
Pages (from-to)101-105
Number of pages5
JournalQuality and Reliability Engineering International
Volume11
Issue number2
DOIs
StatePublished - 1995

Keywords

  • Kalman filtering
  • quality control charts
  • semiconductor manufacturing
  • short runs

ASJC Scopus subject areas

  • Safety, Risk, Reliability and Quality
  • Management Science and Operations Research

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