Integrated Solgel M Thin-Films on Pt, Si, and Gaas for Non-Volatile Memory Applications

Sandwip Dey

doi:10.1080/00150199008018730

Integrated Solgel M Thin-Films on Pt, Si, and Gaas for Non-Volatile Memory Applications

Sandwip Dey

Chemical Engineering

Research output: Contribution to journal › Article › peer-review

203 Scopus citations

Abstract

Properties of integrated sol-gel PZT thin-films of various ZrDi ratios, evaluated as a function of processing parameters, are presented and discussed. The substrate materials for the P2T depositions encompassed R, Si, and GaAs. The design, fabrication, and operation of a single F%T element combined with the GaAs JFET planar integrated circuit technology to produce non-volatile programmable random access memories (NVPRAM) 8 ∼pere sented.

Original language	English (US)
Pages (from-to)	37-46
Number of pages	10
Journal	Ferroelectrics
Volume	108
Issue number	1
DOIs	https://doi.org/10.1080/00150199008018730
State	Published - Aug 1 1990

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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10.1080/00150199008018730

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abstract = "Properties of integrated sol-gel PZT thin-films of various ZrDi ratios, evaluated as a function of processing parameters, are presented and discussed. The substrate materials for the P2T depositions encompassed R, Si, and GaAs. The design, fabrication, and operation of a single F%T element combined with the GaAs JFET planar integrated circuit technology to produce non-volatile programmable random access memories (NVPRAM) 8 ∼pere sented.",

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year = "1990",

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AB - Properties of integrated sol-gel PZT thin-films of various ZrDi ratios, evaluated as a function of processing parameters, are presented and discussed. The substrate materials for the P2T depositions encompassed R, Si, and GaAs. The design, fabrication, and operation of a single F%T element combined with the GaAs JFET planar integrated circuit technology to produce non-volatile programmable random access memories (NVPRAM) 8 ∼pere sented.

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Integrated Solgel M Thin-Films on Pt, Si, and Gaas for Non-Volatile Memory Applications

Abstract

ASJC Scopus subject areas

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