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Influence of grown-in defects on the optical and electrical properties of Si/Si1-xGex/Si heterostructures
R. Loo, M. Caymax, E. Simoen, D. Howard, M. Goryll, D. Klaes, L. Vescan, D. Gravesteijn, H. Pettersson, X. Zhang
Research output: Contribution to journal › Article › peer-review
4
Scopus
citations