HYDROGEN ADSORPTION ON Si(110)-(7 multiplied by 7).

R. J. Culbertson, L. C. Feldman, P. J. Silverman, R. Haight

Research output: Contribution to journalConference article

93 Scopus citations

Abstract

Deuterium adsorption on the clean Si(111)-(7 multiplied by 7) surface was quantitatively studied by determining the absolute coverage as a function of exposure using nuclear microanalysis. The coverage was correlated with structural changes observed by low energy diffraction and the high energy ion scattering surface peak. A saturation coverage of 1. 25 plus or minus 0. 13 monolayers was established for activated deuterium adsorption.

Original languageEnglish (US)
Pages (from-to)868-871
Number of pages4
JournalJournal of vacuum science & technology
Volume20
Issue number3
DOIs
StatePublished - Jan 1 1981
Externally publishedYes
EventProc of the Natl Symp of the Am Vac Soc, Pt 1 - Anaheim, Calif, USA
Duration: Nov 2 1981Nov 6 1981

ASJC Scopus subject areas

  • Engineering(all)

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