Deuterium adsorption on the clean Si(111)-(7 multiplied by 7) surface was quantitatively studied by determining the absolute coverage as a function of exposure using nuclear microanalysis. The coverage was correlated with structural changes observed by low energy diffraction and the high energy ion scattering surface peak. A saturation coverage of 1. 25 plus or minus 0. 13 monolayers was established for activated deuterium adsorption.
|Original language||English (US)|
|Number of pages||4|
|Journal||Journal of vacuum science & technology|
|State||Published - Jan 1 1981|
|Event||Proc of the Natl Symp of the Am Vac Soc, Pt 1 - Anaheim, Calif, USA|
Duration: Nov 2 1981 → Nov 6 1981
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