TY - JOUR
T1 - High throughput micropatterning of optical oxygen sensor for single cell analysis
AU - Zhu, Haixin
AU - Tian, Yanqing
AU - Bhushan, Shivani
AU - Su, Fengyu
AU - Meldrum, Deirdre
N1 - Funding Information:
Manuscript received October 18, 2011; revised November 14, 2011; accepted November 15, 2011. Date of publication November 22, 2011; date of current version April 20, 2012. This work was supported in part by the NIH National Human Genome Research Institute, Centers of Excellence in Genomic Science, under Grant 5 P50 HG002360. This is an expanded paper from the IEEE SENSORS 2010 Conference. The associate editor coordinating the review of this paper and approving it for publication was Dr. M. Nurul Abedin.
PY - 2012
Y1 - 2012
N2 - In this paper, we present our results from process development and characterization of optical oxygen sensors that are patterned by traditional UV lithography. An oxygen sensitive luminescent probe, platinum octaethylporphyrin, was encapsulated in commercially purchased photoresist (AZ5214) to form uniform thin sensor films on fused silica substrates. Plasticizer ethoxylated trimethylolpropane triacrylate (SR454) was added to the dye-photoresist sensor mixtures to improve the oxygen sensitivity. The optimum sensor mixture composition that can be patterned with maximum sensitivity was identified. The microfabrication process conditions, cell adherence and oxygen sensitivity results from patterned structures were characterized in detail. Down to 3 μm features have been fabricated on fused silica substrates using the developed techniques. The result implies that the developed methods can provide a feasible way to miniaturize the optical sensor system for single cell analysis with precise control of sensor volume and response.
AB - In this paper, we present our results from process development and characterization of optical oxygen sensors that are patterned by traditional UV lithography. An oxygen sensitive luminescent probe, platinum octaethylporphyrin, was encapsulated in commercially purchased photoresist (AZ5214) to form uniform thin sensor films on fused silica substrates. Plasticizer ethoxylated trimethylolpropane triacrylate (SR454) was added to the dye-photoresist sensor mixtures to improve the oxygen sensitivity. The optimum sensor mixture composition that can be patterned with maximum sensitivity was identified. The microfabrication process conditions, cell adherence and oxygen sensitivity results from patterned structures were characterized in detail. Down to 3 μm features have been fabricated on fused silica substrates using the developed techniques. The result implies that the developed methods can provide a feasible way to miniaturize the optical sensor system for single cell analysis with precise control of sensor volume and response.
KW - Dissolved oxygen sensing
KW - extracellular sensing
KW - microfabrication
KW - optical chemical sensor
KW - single cell analysis
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U2 - 10.1109/JSEN.2011.2176930
DO - 10.1109/JSEN.2011.2176930
M3 - Article
AN - SCOPUS:84860502550
SN - 1530-437X
VL - 12
SP - 1668
EP - 1672
JO - IEEE Sensors Journal
JF - IEEE Sensors Journal
IS - 6
M1 - 6086560
ER -