High throughput micropatterning of optical oxygen sensor for single cell analysis

Haixin Zhu, Yanqing Tian, Shivani Bhushan, Fengyu Su, Deirdre Meldrum

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

In this paper, we present our results from process development and characterization of optical oxygen sensors that are patterned by traditional UV lithography. An oxygen sensitive luminescent probe, platinum octaethylporphyrin, was encapsulated in commercially purchased photoresist (AZ5214) to form uniform thin sensor films on fused silica substrates. Plasticizer ethoxylated trimethylolpropane triacrylate (SR454) was added to the dye-photoresist sensor mixtures to improve the oxygen sensitivity. The optimum sensor mixture composition that can be patterned with maximum sensitivity was identified. The microfabrication process conditions, cell adherence and oxygen sensitivity results from patterned structures were characterized in detail. Down to 3 μm features have been fabricated on fused silica substrates using the developed techniques. The result implies that the developed methods can provide a feasible way to miniaturize the optical sensor system for single cell analysis with precise control of sensor volume and response.

Original languageEnglish (US)
Article number6086560
Pages (from-to)1668-1672
Number of pages5
JournalIEEE Sensors Journal
Volume12
Issue number6
DOIs
StatePublished - 2012

Fingerprint

Oxygen sensors
Optical sensors
Throughput
sensors
Sensors
oxygen
Photoresists
Fused silica
cells
Oxygen
photoresists
sensitivity
Microfabrication
Plasticizers
silicon dioxide
Substrates
plasticizers
Lithography
Platinum
optical measuring instruments

Keywords

  • Dissolved oxygen sensing
  • extracellular sensing
  • microfabrication
  • optical chemical sensor
  • single cell analysis

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation

Cite this

High throughput micropatterning of optical oxygen sensor for single cell analysis. / Zhu, Haixin; Tian, Yanqing; Bhushan, Shivani; Su, Fengyu; Meldrum, Deirdre.

In: IEEE Sensors Journal, Vol. 12, No. 6, 6086560, 2012, p. 1668-1672.

Research output: Contribution to journalArticle

Zhu, Haixin ; Tian, Yanqing ; Bhushan, Shivani ; Su, Fengyu ; Meldrum, Deirdre. / High throughput micropatterning of optical oxygen sensor for single cell analysis. In: IEEE Sensors Journal. 2012 ; Vol. 12, No. 6. pp. 1668-1672.
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