High-resolution and low-voltage FE-SEM imaging and microanalysis in materials characterization

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

Nanometer-resolution imaging in field-emission SEM (FE-SEM) instruments is now widely used in materials characterization. The use of a high-brightness field-emission gun and a high-resolution lens system makes it possible to acquire nanometer-resolution surface images at low voltages (<5 kV). The advantages of low-voltage FE-SEM include enhanced surface sensitivity, reduced sample charging for nonconducting materials, reduced damage of delicate samples, and significantly reduced electron range and interaction volume in bulk samples. For microanalysis using characteristic X-ray signals, the spatial resolution is significantly improved and the surface sensitivity is enhanced because of the fall of electron range at low voltages. With further development of high energy resolution X-ray detectors and probe-forming lenses, low-voltage imaging and microanalysis in FE-SEM instruments will be competitive both in spatial resolution and in chemical sensitivity to those now achievable in analytical TEM instruments. Applications of low-voltage SE imaging and microanalysis techniques to the study of various types of bulk materials are discussed.

Original languageEnglish (US)
Pages (from-to)353-363
Number of pages11
JournalMaterials Characterization
Volume44
Issue number4
DOIs
StatePublished - Apr 2000
Externally publishedYes

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Microanalysis
microanalysis
Field emission
low voltage
field emission
Imaging techniques
Scanning electron microscopy
scanning electron microscopy
high resolution
Electric potential
Lenses
spatial resolution
lenses
X rays
Electrons
imaging techniques
charging
Luminance
brightness
electrons

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

High-resolution and low-voltage FE-SEM imaging and microanalysis in materials characterization. / Liu, Jingyue.

In: Materials Characterization, Vol. 44, No. 4, 04.2000, p. 353-363.

Research output: Contribution to journalArticle

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