High DC Current Density On-Chip Strip-Line Inductors Integrated with Magnetic Film

The integration of voltage regulator on the chip substrate in system on chip can reduce interconnect resistive losses, facilitates real-time power management with control of the supply voltage, and requires to manufacture small inductors with high inductance density, power density, and efficiency with large current carrying capability. In this paper, we fabricated a strip-line on-chip inductor with separate conductive windings wrapped by boron-incorporated amorphous Co-Zr-Ta-B film. We examined its response of inductance and quality factor as a function of an applied dc current and its large current density capability.