Film bulk acoustic-wave resonator based relative humidity sensor using ZnO films

Xiaotun Qiu; Jon Oiler; Jie Zhu; Ziyu Wang; Rui Tang; Cunjiang Yu; Hongyu Yu

doi:10.1149/1.3332397

Film bulk acoustic-wave resonator based relative humidity sensor using ZnO films

Xiaotun Qiu, Jon Oiler, Jie Zhu, Ziyu Wang, Rui Tang, Cunjiang Yu, Hongyu Yu

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

This article described relative humidity (RH) sensing using a ZnO-based film bulk acoustic-wave resonator (FBAR). The resonant frequency of the FBAR decreased in a two-stage manner as the RH increased. For low RH, a frequency downshift of 2.2 kHz per 1% RH change was observed. This effect was attributed to water molecules replacing the adsorbed oxygen on the ZnO surface, thus increasing the density of the film. For high RH, a frequency downshift of 8.5 kHz per 1% RH change was obtained, which was due to the mass loading effect of the water layers formed on the ZnO surface.

Original language	English (US)
Pages (from-to)	J65-J67
Journal	Electrochemical and Solid-State Letters
Volume	13
Issue number	5
DOIs	https://doi.org/10.1149/1.3332397
State	Published - 2010

ASJC Scopus subject areas

General Chemical Engineering
General Materials Science
Physical and Theoretical Chemistry
Electrochemistry
Electrical and Electronic Engineering

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abstract = "This article described relative humidity (RH) sensing using a ZnO-based film bulk acoustic-wave resonator (FBAR). The resonant frequency of the FBAR decreased in a two-stage manner as the RH increased. For low RH, a frequency downshift of 2.2 kHz per 1% RH change was observed. This effect was attributed to water molecules replacing the adsorbed oxygen on the ZnO surface, thus increasing the density of the film. For high RH, a frequency downshift of 8.5 kHz per 1% RH change was obtained, which was due to the mass loading effect of the water layers formed on the ZnO surface.",

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T1 - Film bulk acoustic-wave resonator based relative humidity sensor using ZnO films

AU - Qiu, Xiaotun

AU - Oiler, Jon

AU - Zhu, Jie

AU - Wang, Ziyu

AU - Tang, Rui

AU - Yu, Cunjiang

AU - Yu, Hongyu

PY - 2010

Y1 - 2010

N2 - This article described relative humidity (RH) sensing using a ZnO-based film bulk acoustic-wave resonator (FBAR). The resonant frequency of the FBAR decreased in a two-stage manner as the RH increased. For low RH, a frequency downshift of 2.2 kHz per 1% RH change was observed. This effect was attributed to water molecules replacing the adsorbed oxygen on the ZnO surface, thus increasing the density of the film. For high RH, a frequency downshift of 8.5 kHz per 1% RH change was obtained, which was due to the mass loading effect of the water layers formed on the ZnO surface.

AB - This article described relative humidity (RH) sensing using a ZnO-based film bulk acoustic-wave resonator (FBAR). The resonant frequency of the FBAR decreased in a two-stage manner as the RH increased. For low RH, a frequency downshift of 2.2 kHz per 1% RH change was observed. This effect was attributed to water molecules replacing the adsorbed oxygen on the ZnO surface, thus increasing the density of the film. For high RH, a frequency downshift of 8.5 kHz per 1% RH change was obtained, which was due to the mass loading effect of the water layers formed on the ZnO surface.

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Film bulk acoustic-wave resonator based relative humidity sensor using ZnO films

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