Film bulk acoustic-wave resonator based relative humidity sensor using ZnO films

Xiaotun Qiu, Jon Oiler, Jie Zhu, Ziyu Wang, Rui Tang, Cunjiang Yu, Hongyu Yu

Research output: Contribution to journalArticle

17 Scopus citations

Abstract

This article described relative humidity (RH) sensing using a ZnO-based film bulk acoustic-wave resonator (FBAR). The resonant frequency of the FBAR decreased in a two-stage manner as the RH increased. For low RH, a frequency downshift of 2.2 kHz per 1% RH change was observed. This effect was attributed to water molecules replacing the adsorbed oxygen on the ZnO surface, thus increasing the density of the film. For high RH, a frequency downshift of 8.5 kHz per 1% RH change was obtained, which was due to the mass loading effect of the water layers formed on the ZnO surface.

Original languageEnglish (US)
Pages (from-to)J65-J67
JournalElectrochemical and Solid-State Letters
Volume13
Issue number5
DOIs
StatePublished - Mar 26 2010

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ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Materials Science(all)
  • Physical and Theoretical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

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