@inproceedings{2b703950ce0249008bccf90b538355fe,
title = "Film bulk acoustic-wave resonator based radiation sensor",
abstract = "This paper describes a high-energy electromagnetic wave radiation detection device using zinc oxide (ZnO) based Film Bulk Acoustic-Wave Resonator (FBAR). The resonant frequency of the FBAR decreased after gamma radiation, with the peak sensitivity of 9.3 kHz/krad and minimum detectable dosage of 218 rad occurring at the lowest experimental dose of 20 krad (all dosages are calibrated with ZnO), while the sensitivity decreased with increasing total ionizing dosage. The incident radiation generated charges that was trapped near the ZnO-silicon nitride (SiN) interface, which increased the plate capacitance of the FBAR, resulting in the decrease of resonant frequency.",
keywords = "Dosimeter, Film bulk acoustic-wave resonator, Frequency shift, Radiation sensor",
author = "Jonathon Oiler and Xiaotun Qiu and Jie Zhu and Ziyu Wang and Cunjiang Yu and Hugh Barnaby and Keith Holbert and Hongyu Yu",
year = "2010",
doi = "10.1109/NEMS.2010.5592605",
language = "English (US)",
isbn = "9781424465439",
series = "2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010",
pages = "967--970",
booktitle = "2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010",
note = "5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 ; Conference date: 20-01-2010 Through 23-01-2010",
}