Film bulk acoustic-wave resonator based radiation sensor

Jonathon Oiler, Xiaotun Qiu, Jie Zhu, Ziyu Wang, Cunjiang Yu, Hugh Barnaby, Keith Holbert, Hongyu Yu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

This paper describes a high-energy electromagnetic wave radiation detection device using zinc oxide (ZnO) based Film Bulk Acoustic-Wave Resonator (FBAR). The resonant frequency of the FBAR decreased after gamma radiation, with the peak sensitivity of 9.3 kHz/krad and minimum detectable dosage of 218 rad occurring at the lowest experimental dose of 20 krad (all dosages are calibrated with ZnO), while the sensitivity decreased with increasing total ionizing dosage. The incident radiation generated charges that was trapped near the ZnO-silicon nitride (SiN) interface, which increased the plate capacitance of the FBAR, resulting in the decrease of resonant frequency.

Original languageEnglish (US)
Title of host publication2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages967-970
Number of pages4
DOIs
StatePublished - Nov 29 2010
Event5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China
Duration: Jan 20 2010Jan 23 2010

Publication series

Name2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Other

Other5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
CountryChina
CityXiamen
Period1/20/101/23/10

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Keywords

  • Dosimeter
  • Film bulk acoustic-wave resonator
  • Frequency shift
  • Radiation sensor

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Oiler, J., Qiu, X., Zhu, J., Wang, Z., Yu, C., Barnaby, H., Holbert, K., & Yu, H. (2010). Film bulk acoustic-wave resonator based radiation sensor. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 (pp. 967-970). [5592605] (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). https://doi.org/10.1109/NEMS.2010.5592605