@inproceedings{8d1532e1a0ca46e68d87bef66bc8ee36,
title = "Experimenting with large-scale semiconductor manufacturing simulations: A frequency domain approach to factor screening",
abstract = "Frequency domain experiments can provide an efficient way to identify important factors of a real system through the use of simulation models. In these experiments, input factors are oscillated at different frequencies. Detecting an oscillation in the output of a particular frequency indicates that the corresponding input variable (or an interaction) has significant impact. This technique is illustrated in factor screening and bottleneck analysis of an actual semiconductor wafer fabrication facility.",
author = "Jennifer Robinson and Lee Schruben and John Fowler",
year = "1993",
month = dec,
day = "1",
language = "English (US)",
isbn = "0898061326",
series = "Proceedings of the Industrial Engineering Research Conference",
publisher = "Publ by IIE",
pages = "112--116",
editor = "Mitta, {Deborah A.} and Burke, {Laura I.} and English, {John R.} and Jennie Gallimore and Georgia-Ann Klutke and Tonkay, {Gregory L.}",
booktitle = "Proceedings of the Industrial Engineering Research Conference",
note = "Proceedings of the 2nd Industrial Engineering Research Conference ; Conference date: 26-05-1993 Through 28-05-1993",
}