Experimenting with large-scale semiconductor manufacturing simulations: A frequency domain approach to factor screening

Jennifer Robinson, Lee Schruben, John Fowler

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

Frequency domain experiments can provide an efficient way to identify important factors of a real system through the use of simulation models. In these experiments, input factors are oscillated at different frequencies. Detecting an oscillation in the output of a particular frequency indicates that the corresponding input variable (or an interaction) has significant impact. This technique is illustrated in factor screening and bottleneck analysis of an actual semiconductor wafer fabrication facility.

Original languageEnglish (US)
Title of host publicationProceedings of the Industrial Engineering Research Conference
EditorsDeborah A. Mitta, Laura I. Burke, John R. English, Jennie Gallimore, Georgia-Ann Klutke, Gregory L. Tonkay
PublisherPubl by IIE
Pages112-116
Number of pages5
ISBN (Print)0898061326
StatePublished - Dec 1 1993
Externally publishedYes
EventProceedings of the 2nd Industrial Engineering Research Conference - Los Angeles, CA, USA
Duration: May 26 1993May 28 1993

Publication series

NameProceedings of the Industrial Engineering Research Conference

Other

OtherProceedings of the 2nd Industrial Engineering Research Conference
CityLos Angeles, CA, USA
Period5/26/935/28/93

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'Experimenting with large-scale semiconductor manufacturing simulations: A frequency domain approach to factor screening'. Together they form a unique fingerprint.

  • Cite this

    Robinson, J., Schruben, L., & Fowler, J. (1993). Experimenting with large-scale semiconductor manufacturing simulations: A frequency domain approach to factor screening. In D. A. Mitta, L. I. Burke, J. R. English, J. Gallimore, G-A. Klutke, & G. L. Tonkay (Eds.), Proceedings of the Industrial Engineering Research Conference (pp. 112-116). (Proceedings of the Industrial Engineering Research Conference). Publ by IIE.