@inproceedings{e214c88863564d7faee0e49ac4f8ae0a,
title = "Electrostatic actuators composed of extensible graphite-PDMS composite membranes",
abstract = "We demonstrate microscale electrostatic actuators in PDMS utilizing extensible composite graphite-PDMS membranes. The electrodes are produced using novel patterning of graphite on plasma treated PDMS, followed by integration of up to 7 layers of PDMS to assemble pneumatic valves in a microfluidic device.",
keywords = "Elastomer, Electrostatic peristaltic pump, Integrated electromechanical circuit, Valve",
author = "Robert Carlson and Deirdre Meldrum",
year = "2005",
language = "English (US)",
isbn = "0974361119",
series = "Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences",
publisher = "Transducer Research Foundation",
pages = "64--66",
booktitle = "Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference",
note = "9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005 ; Conference date: 09-10-2005 Through 13-10-2005",
}