Electrostatic actuators composed of extensible graphite-PDMS composite membranes

Robert Carlson, Deirdre Meldrum

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

We demonstrate microscale electrostatic actuators in PDMS utilizing extensible composite graphite-PDMS membranes. The electrodes are produced using novel patterning of graphite on plasma treated PDMS, followed by integration of up to 7 layers of PDMS to assemble pneumatic valves in a microfluidic device.

Original languageEnglish (US)
Title of host publicationMicro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference
Subtitle of host publication9th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherTransducer Research Foundation
Pages64-66
Number of pages3
ISBN (Print)0974361119, 9780974361116
StatePublished - Jan 1 2005
Externally publishedYes
Event9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005 - Boston, MA, United States
Duration: Oct 9 2005Oct 13 2005

Publication series

NameMicro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences
Volume1

Other

Other9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005
Country/TerritoryUnited States
CityBoston, MA
Period10/9/0510/13/05

Keywords

  • Elastomer
  • Electrostatic peristaltic pump
  • Integrated electromechanical circuit
  • Valve

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

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