Electrostatic actuators composed of extensible graphite-PDMS composite membranes

Robert Carlson, Deirdre Meldrum

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We demonstrate microscale electrostatic actuators in PDMS utilizing extensible composite graphite-PDMS membranes. The electrodes are produced using novel patterning of graphite on plasma treated PDMS, followed by integration of up to 7 layers of PDMS to assemble pneumatic valves in a microfluidic device.

Original languageEnglish (US)
Title of host publicationMicro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherTransducer Research Foundation
Pages64-66
Number of pages3
Volume1
ISBN (Print)0974361119, 9780974361116
StatePublished - 2005
Externally publishedYes
Event9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005 - Boston, MA, United States
Duration: Oct 9 2005Oct 13 2005

Other

Other9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005
CountryUnited States
CityBoston, MA
Period10/9/0510/13/05

Fingerprint

Electrostatic actuators
Graphite
Composite membranes
Microfluidics
Pneumatics
Membranes
Plasmas
Electrodes
Composite materials

Keywords

  • Elastomer
  • Electrostatic peristaltic pump
  • Integrated electromechanical circuit
  • Valve

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

Cite this

Carlson, R., & Meldrum, D. (2005). Electrostatic actuators composed of extensible graphite-PDMS composite membranes. In Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (Vol. 1, pp. 64-66). Transducer Research Foundation.

Electrostatic actuators composed of extensible graphite-PDMS composite membranes. / Carlson, Robert; Meldrum, Deirdre.

Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Vol. 1 Transducer Research Foundation, 2005. p. 64-66.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Carlson, R & Meldrum, D 2005, Electrostatic actuators composed of extensible graphite-PDMS composite membranes. in Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences. vol. 1, Transducer Research Foundation, pp. 64-66, 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005, Boston, MA, United States, 10/9/05.
Carlson R, Meldrum D. Electrostatic actuators composed of extensible graphite-PDMS composite membranes. In Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Vol. 1. Transducer Research Foundation. 2005. p. 64-66
Carlson, Robert ; Meldrum, Deirdre. / Electrostatic actuators composed of extensible graphite-PDMS composite membranes. Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Vol. 1 Transducer Research Foundation, 2005. pp. 64-66
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