Electron lithography in glasses by STEM

Nan Jiang; Gary Hembree; John Spence

doi:10.1017/s1431927603441500

Electron lithography in glasses by STEM

Nan Jiang, Gary Hembree, John Spence

Physics

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	300-301
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	9
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/s1431927603441500
State	Published - 2003

ASJC Scopus subject areas

Instrumentation

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10.1017/s1431927603441500

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title = "Electron lithography in glasses by STEM",

author = "Nan Jiang and Gary Hembree and John Spence",

year = "2003",

doi = "10.1017/s1431927603441500",

language = "English (US)",

volume = "9",

pages = "300--301",

journal = "Microscopy and Microanalysis",

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publisher = "Cambridge University Press",

number = "SUPPL. 2",

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AU - Jiang, Nan

AU - Hembree, Gary

AU - Spence, John

PY - 2003

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JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

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Electron lithography in glasses by STEM

ASJC Scopus subject areas

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