Effect of growth conditions on structural and electrical properties of Pb(ZrxTi1-x)O3 layers grown by peroxide MBE

N. Izyumskaya; V. Avrutin; X. Gu; B. Xiao; S. Chevtchenko; Lin Zhou; David Smith; J. G. Yoon; H. Morkoc

Effect of growth conditions on structural and electrical properties of Pb(Zr_xTi_1-x)O₃ layers grown by peroxide MBE

N. Izyumskaya, V. Avrutin, X. Gu, B. Xiao, S. Chevtchenko, Lin Zhou, David Smith, J. G. Yoon, H. Morkoc

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Pb(Zr_xTi_1-x)O₃ (PZT) films were grown by molecular beam epitaxy using hydrogen peroxide as a source of reactive oxygen. Phase composition as well as structural and electrical properties of the films were studied by x-ray diffractometry, scanning and transmission electron microscopy, conductive atomic force microscopy, and electrical (I-V and polarization-field) measurements. The hydrogen peroxide pressure was found to control the phase composition of the films. Excess peroxide leads to PbO inclusions in PZT layers, whereas deficiency results in the TiO₂ or the ZrO₂ phase. The second-phase inclusions can be responsible for high leakage current in the films. Precise control over the peroxide pressure is imperative for single-phase PZT films with good ferroelectric properties.

Original language	English (US)
Title of host publication	Ferroelectrics, Multiferroics, and Magnetoelectrics
Pages	32-37
Number of pages	6
State	Published - 2008
Event	2007 MRS Fall Meeting - Boston, MA, United States Duration: Nov 26 2007 → Nov 30 2007

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	1034
ISSN (Print)	0272-9172

Other

Other	2007 MRS Fall Meeting
Country/Territory	United States
City	Boston, MA
Period	11/26/07 → 11/30/07

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

Effect of growth conditions on structural and electrical properties of Pb(Zr_xTi_1-x)O₃ layers grown by peroxide MBE. / Izyumskaya, N.; Avrutin, V.; Gu, X. et al.
Ferroelectrics, Multiferroics, and Magnetoelectrics. 2008. p. 32-37 (Materials Research Society Symposium Proceedings; Vol. 1034).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Izyumskaya, N, Avrutin, V, Gu, X, Xiao, B, Chevtchenko, S, Zhou, L, Smith, D, Yoon, JG & Morkoc, H 2008, Effect of growth conditions on structural and electrical properties of Pb(Zr_xTi_1-x)O₃ layers grown by peroxide MBE. in Ferroelectrics, Multiferroics, and Magnetoelectrics. Materials Research Society Symposium Proceedings, vol. 1034, pp. 32-37, 2007 MRS Fall Meeting, Boston, MA, United States, 11/26/07.

@inproceedings{190e62eb33704bcba715470c27f439ac,

title = "Effect of growth conditions on structural and electrical properties of Pb(ZrxTi1-x)O3 layers grown by peroxide MBE",

abstract = "Pb(ZrxTi1-x)O3 (PZT) films were grown by molecular beam epitaxy using hydrogen peroxide as a source of reactive oxygen. Phase composition as well as structural and electrical properties of the films were studied by x-ray diffractometry, scanning and transmission electron microscopy, conductive atomic force microscopy, and electrical (I-V and polarization-field) measurements. The hydrogen peroxide pressure was found to control the phase composition of the films. Excess peroxide leads to PbO inclusions in PZT layers, whereas deficiency results in the TiO2 or the ZrO2 phase. The second-phase inclusions can be responsible for high leakage current in the films. Precise control over the peroxide pressure is imperative for single-phase PZT films with good ferroelectric properties.",

author = "N. Izyumskaya and V. Avrutin and X. Gu and B. Xiao and S. Chevtchenko and Lin Zhou and David Smith and Yoon, {J. G.} and H. Morkoc",

year = "2008",

language = "English (US)",

isbn = "9781605608297",

series = "Materials Research Society Symposium Proceedings",

pages = "32--37",

booktitle = "Ferroelectrics, Multiferroics, and Magnetoelectrics",

note = "2007 MRS Fall Meeting ; Conference date: 26-11-2007 Through 30-11-2007",

}

TY - GEN

T1 - Effect of growth conditions on structural and electrical properties of Pb(ZrxTi1-x)O3 layers grown by peroxide MBE

AU - Izyumskaya, N.

AU - Avrutin, V.

AU - Gu, X.

AU - Xiao, B.

AU - Chevtchenko, S.

AU - Zhou, Lin

AU - Smith, David

AU - Yoon, J. G.

AU - Morkoc, H.

PY - 2008

Y1 - 2008

N2 - Pb(ZrxTi1-x)O3 (PZT) films were grown by molecular beam epitaxy using hydrogen peroxide as a source of reactive oxygen. Phase composition as well as structural and electrical properties of the films were studied by x-ray diffractometry, scanning and transmission electron microscopy, conductive atomic force microscopy, and electrical (I-V and polarization-field) measurements. The hydrogen peroxide pressure was found to control the phase composition of the films. Excess peroxide leads to PbO inclusions in PZT layers, whereas deficiency results in the TiO2 or the ZrO2 phase. The second-phase inclusions can be responsible for high leakage current in the films. Precise control over the peroxide pressure is imperative for single-phase PZT films with good ferroelectric properties.

AB - Pb(ZrxTi1-x)O3 (PZT) films were grown by molecular beam epitaxy using hydrogen peroxide as a source of reactive oxygen. Phase composition as well as structural and electrical properties of the films were studied by x-ray diffractometry, scanning and transmission electron microscopy, conductive atomic force microscopy, and electrical (I-V and polarization-field) measurements. The hydrogen peroxide pressure was found to control the phase composition of the films. Excess peroxide leads to PbO inclusions in PZT layers, whereas deficiency results in the TiO2 or the ZrO2 phase. The second-phase inclusions can be responsible for high leakage current in the films. Precise control over the peroxide pressure is imperative for single-phase PZT films with good ferroelectric properties.

UR - http://www.scopus.com/inward/record.url?scp=70350333898&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=70350333898&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:70350333898

SN - 9781605608297

T3 - Materials Research Society Symposium Proceedings

SP - 32

EP - 37

BT - Ferroelectrics, Multiferroics, and Magnetoelectrics

T2 - 2007 MRS Fall Meeting

Y2 - 26 November 2007 through 30 November 2007

ER -