Effect of composition on phase formation and morphology in Ti-Si1-xGex solid phase reactions

D. B. Aldrich, Y. L. Chen, D. E. Sayers, Robert Nemanich, S. P. Ashburn, M. C. Ozturk

Research output: Contribution to journalArticle

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Abstract

The effects of Si1-xGex alloy composition on the Ti-Si1-xGex solid phase reaction are examined. Specifically, effects on the titanium germanosilicide phase formation sequence, C54 Ti (Si1-yGey)2 nucleation temperature, and C54 Ti (Si1-yGey)2 morphology were analyzed. It is determined that the Ti-Si1-xGex reaction follows a 'Ti-Si-like' reaction path for Si-rich Si1-xGex alloys. The coexistence of multiple titanium germanosilicide phases is observed during Ti-Si1-xGex reactions for Si1-xGex alloys in an intermediate composition range. The morphology and stability of the resulting C54 germanosilicides are directly correlated to the Ti-Si1-xGex reaction path.

Original languageEnglish (US)
Pages (from-to)2849-2863
Number of pages15
JournalJournal of Materials Research
Volume10
Issue number11
StatePublished - Nov 1995
Externally publishedYes

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solid phases
Titanium
Chemical analysis
titanium
Nucleation
nucleation
Temperature
temperature

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Aldrich, D. B., Chen, Y. L., Sayers, D. E., Nemanich, R., Ashburn, S. P., & Ozturk, M. C. (1995). Effect of composition on phase formation and morphology in Ti-Si1-xGex solid phase reactions. Journal of Materials Research, 10(11), 2849-2863.

Effect of composition on phase formation and morphology in Ti-Si1-xGex solid phase reactions. / Aldrich, D. B.; Chen, Y. L.; Sayers, D. E.; Nemanich, Robert; Ashburn, S. P.; Ozturk, M. C.

In: Journal of Materials Research, Vol. 10, No. 11, 11.1995, p. 2849-2863.

Research output: Contribution to journalArticle

Aldrich, DB, Chen, YL, Sayers, DE, Nemanich, R, Ashburn, SP & Ozturk, MC 1995, 'Effect of composition on phase formation and morphology in Ti-Si1-xGex solid phase reactions', Journal of Materials Research, vol. 10, no. 11, pp. 2849-2863.
Aldrich, D. B. ; Chen, Y. L. ; Sayers, D. E. ; Nemanich, Robert ; Ashburn, S. P. ; Ozturk, M. C. / Effect of composition on phase formation and morphology in Ti-Si1-xGex solid phase reactions. In: Journal of Materials Research. 1995 ; Vol. 10, No. 11. pp. 2849-2863.
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AU - Ashburn, S. P.

AU - Ozturk, M. C.

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