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DTFab: A Digital Twin based Approach for Optimal Reticle Management in Semiconductor Photolithography
Chandrasekhar Komaralingam Sivasubramanian, Robert Dodge, Aditya Ramani, David Bayba, Mani Janakiram, Eric Butcher, Joseph Gonzales, Giulia Pedrielli
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations