Doubly charged sputtered ions of fourth-row elements

Stephen N. Schauer, Peter Williams

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

We have measured the initial-kinetic-energy distributions of sputtered doubly charged ions of the fourth-row elements (Ca-As) over a range 0-1000 eV and energy distributions of singly charged ions 0-500 eV. The energy distributions of the doubly charged ions lack the characteristic low-energy peak exhibited by most sputtered ions, and some actually have peak intensities at high energy. Oxygen enhances the doubly charged ion yields of Sc2+-Ni2+ and alters the energy distributions of these ions, increasing the proportion of low-energy ions, but either does not affect or suppresses ion yields from Ca2+ and Cu2+-As2+. These results can be explained in terms of the kinetic emission model, in which an atom sputtered with a core-level vacancy resulting from an energetic collision has a finite probability, dependent on the atom velocity and the vacancy lifetime, of undergoing Auger deexcitation far enough from the surface for the resulting multiply charged ion to survive. The effect of oxygen is interpreted as a lengthening of the vacancy lifetime due to electron withdrawal from the cations in an oxygenated lattice.

Original languageEnglish (US)
Pages (from-to)15452-15464
Number of pages13
JournalPhysical Review B
Volume46
Issue number23
DOIs
StatePublished - 1992

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Ions
ions
energy distribution
Vacancies
Oxygen
life (durability)
Atoms
Core levels
oxygen
Kinetic energy
atoms
energy
Cations
proportion
kinetic energy
Positive ions
cations
Kinetics
collisions
Electrons

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Doubly charged sputtered ions of fourth-row elements. / Schauer, Stephen N.; Williams, Peter.

In: Physical Review B, Vol. 46, No. 23, 1992, p. 15452-15464.

Research output: Contribution to journalArticle

Schauer, Stephen N. ; Williams, Peter. / Doubly charged sputtered ions of fourth-row elements. In: Physical Review B. 1992 ; Vol. 46, No. 23. pp. 15452-15464.
@article{a6943f53d8e846789162efc15d1acc85,
title = "Doubly charged sputtered ions of fourth-row elements",
abstract = "We have measured the initial-kinetic-energy distributions of sputtered doubly charged ions of the fourth-row elements (Ca-As) over a range 0-1000 eV and energy distributions of singly charged ions 0-500 eV. The energy distributions of the doubly charged ions lack the characteristic low-energy peak exhibited by most sputtered ions, and some actually have peak intensities at high energy. Oxygen enhances the doubly charged ion yields of Sc2+-Ni2+ and alters the energy distributions of these ions, increasing the proportion of low-energy ions, but either does not affect or suppresses ion yields from Ca2+ and Cu2+-As2+. These results can be explained in terms of the kinetic emission model, in which an atom sputtered with a core-level vacancy resulting from an energetic collision has a finite probability, dependent on the atom velocity and the vacancy lifetime, of undergoing Auger deexcitation far enough from the surface for the resulting multiply charged ion to survive. The effect of oxygen is interpreted as a lengthening of the vacancy lifetime due to electron withdrawal from the cations in an oxygenated lattice.",
author = "Schauer, {Stephen N.} and Peter Williams",
year = "1992",
doi = "10.1103/PhysRevB.46.15452",
language = "English (US)",
volume = "46",
pages = "15452--15464",
journal = "Physical Review B-Condensed Matter",
issn = "0163-1829",
publisher = "American Institute of Physics Publising LLC",
number = "23",

}

TY - JOUR

T1 - Doubly charged sputtered ions of fourth-row elements

AU - Schauer, Stephen N.

AU - Williams, Peter

PY - 1992

Y1 - 1992

N2 - We have measured the initial-kinetic-energy distributions of sputtered doubly charged ions of the fourth-row elements (Ca-As) over a range 0-1000 eV and energy distributions of singly charged ions 0-500 eV. The energy distributions of the doubly charged ions lack the characteristic low-energy peak exhibited by most sputtered ions, and some actually have peak intensities at high energy. Oxygen enhances the doubly charged ion yields of Sc2+-Ni2+ and alters the energy distributions of these ions, increasing the proportion of low-energy ions, but either does not affect or suppresses ion yields from Ca2+ and Cu2+-As2+. These results can be explained in terms of the kinetic emission model, in which an atom sputtered with a core-level vacancy resulting from an energetic collision has a finite probability, dependent on the atom velocity and the vacancy lifetime, of undergoing Auger deexcitation far enough from the surface for the resulting multiply charged ion to survive. The effect of oxygen is interpreted as a lengthening of the vacancy lifetime due to electron withdrawal from the cations in an oxygenated lattice.

AB - We have measured the initial-kinetic-energy distributions of sputtered doubly charged ions of the fourth-row elements (Ca-As) over a range 0-1000 eV and energy distributions of singly charged ions 0-500 eV. The energy distributions of the doubly charged ions lack the characteristic low-energy peak exhibited by most sputtered ions, and some actually have peak intensities at high energy. Oxygen enhances the doubly charged ion yields of Sc2+-Ni2+ and alters the energy distributions of these ions, increasing the proportion of low-energy ions, but either does not affect or suppresses ion yields from Ca2+ and Cu2+-As2+. These results can be explained in terms of the kinetic emission model, in which an atom sputtered with a core-level vacancy resulting from an energetic collision has a finite probability, dependent on the atom velocity and the vacancy lifetime, of undergoing Auger deexcitation far enough from the surface for the resulting multiply charged ion to survive. The effect of oxygen is interpreted as a lengthening of the vacancy lifetime due to electron withdrawal from the cations in an oxygenated lattice.

UR - http://www.scopus.com/inward/record.url?scp=0000541654&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0000541654&partnerID=8YFLogxK

U2 - 10.1103/PhysRevB.46.15452

DO - 10.1103/PhysRevB.46.15452

M3 - Article

AN - SCOPUS:0000541654

VL - 46

SP - 15452

EP - 15464

JO - Physical Review B-Condensed Matter

JF - Physical Review B-Condensed Matter

SN - 0163-1829

IS - 23

ER -