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Design and analysis of a PZT-based micromachined acoustic sensor with increased sensitivity
Zheyao Wang,
Chao Wang
, Litian Liu
Research output
:
Contribution to journal
›
Article
›
peer-review
28
Scopus citations
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Engineering & Materials Science
Lead zirconate titanate
100%
Acoustics
67%
Electrodes
63%
Sensors
42%
Microsensors
25%
Polarization
25%
Capacitance
23%
Conformal mapping
12%
Thin films
8%
Capacitors
7%
Physics & Astronomy
electrodes
51%
sensors
50%
sensitivity
48%
acoustics
47%
parallel plates
28%
capacitance
21%
polarization
14%
design analysis
12%
conformal mapping
11%
lead zirconate titanates
10%
capacitors
7%
formulations
6%
coefficients
4%
thin films
4%
Medicine & Life Sciences
Acoustics
83%
Electrodes
71%
lead titanate zirconate
19%
Parturition
6%
Equipment and Supplies
5%