CVD of solid oxides in porous media for ceramic membrane preparation or modification. Explicit solutions for deposition characteristics

George Xomeritakis, Jerry Lin

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

A theoretical analysis of modified chemical vapor deposition (MCVD) of solid oxides in porous media for ceramic membrane preparation and/or modification is presented in this paper. Semi-analytical solutions have been obtained to describe the evolution of solid deposit profiles inside porous substrates, using a phenomenological model that takes into account intrapore precursor diffusion, chemical reaction and pore geometry change. Explicit equations have been derived which correlate the three main deposition characteristics, deposit location, deposit zone thickness and pore closure time to the CVD experimental parameters and substrate pore structure. Such explicit equations provide better insight into this unique CVD process for advanced materials synthesis and are very useful in practical applications. A comparison of the semi-analytical solutions with a numerical solution based on the finite element method is also presented. The semi-analytical solutions are in good agreement with the numerical solutions, especially under the conditions used for ceramic membrane preparation and/or modification.

Original languageEnglish (US)
Pages (from-to)3909-3922
Number of pages14
JournalChemical Engineering Science
Volume49
Issue number23
DOIs
StatePublished - 1994
Externally publishedYes

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Ceramic membranes
Oxides
Porous materials
Chemical vapor deposition
Deposits
Substrates
Pore structure
Chemical reactions
Finite element method
Geometry

ASJC Scopus subject areas

  • Chemical Engineering(all)

Cite this

CVD of solid oxides in porous media for ceramic membrane preparation or modification. Explicit solutions for deposition characteristics. / Xomeritakis, George; Lin, Jerry.

In: Chemical Engineering Science, Vol. 49, No. 23, 1994, p. 3909-3922.

Research output: Contribution to journalArticle

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