Crystalline intermediate phases in the formation of epitaxial NiSi2 on Si(111)

Peter Bennett; B. N. Haiawith; A. P. Johnson

doi:10.1116/1.574932

Crystalline intermediate phases in the formation of epitaxial NiSi₂ on Si(111)

Peter Bennett, B. N. Haiawith, A. P. Johnson

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	2121-2126
Number of pages	6
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	5
Issue number	4
DOIs	https://doi.org/10.1116/1.574932
State	Published - Jul 1 1987

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1116/1.574932

Cite this

@article{6143132bcd4549a2965f3701635fe48e,

title = "Crystalline intermediate phases in the formation of epitaxial NiSi2 on Si(111)",

author = "Peter Bennett and Haiawith, {B. N.} and Johnson, {A. P.}",

year = "1987",

month = jul,

day = "1",

doi = "10.1116/1.574932",

language = "English (US)",

volume = "5",

pages = "2121--2126",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "4",

}

TY - JOUR

T1 - Crystalline intermediate phases in the formation of epitaxial NiSi2 on Si(111)

AU - Bennett, Peter

AU - Haiawith, B. N.

AU - Johnson, A. P.

PY - 1987/7/1

Y1 - 1987/7/1

UR - http://www.scopus.com/inward/record.url?scp=84910767477&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84910767477&partnerID=8YFLogxK

U2 - 10.1116/1.574932

DO - 10.1116/1.574932

M3 - Article

AN - SCOPUS:84910767477

SN - 0734-2101

VL - 5

SP - 2121

EP - 2126

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4

ER -

Crystalline intermediate phases in the formation of epitaxial NiSi2 on Si(111)

ASJC Scopus subject areas

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Crystalline intermediate phases in the formation of epitaxial NiSi₂ on Si(111)