Crystalline intermediate phases in the formation of epitaxial NiSi2 on Si(111)

Peter Bennett, B. N. Haiawith, A. P. Johnson

Research output: Contribution to journalArticlepeer-review

12 Scopus citations
Original languageEnglish (US)
Pages (from-to)2121-2126
Number of pages6
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume5
Issue number4
DOIs
StatePublished - Jul 1 1987

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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