Correlation of morphology and electrical properties of nanoscale TiSi₂ epitaxial islands on Si (001)

Chemical Compounds

• Schottky Barrier 100%
• Size Distribution 64%
• Electrical Property 61%
• Dimension 54%
• Surface Roughness 36%
• Interfacial Energy 35%
• Etching 32%
• Vacuum 29%
• Atomic Force Microscopy 28%
• Annealing 28%
• Strain 25%
• Surface 23%
• Plasma 22%
• Diffusion 22%

Engineering & Materials Science

• Electric properties 77%
• Substrates 51%
• Vacuum deposition 31%
• Ultrahigh vacuum 28%
• Atomic force microscopy 23%
• Interfacial energy 22%
• Etching 19%
• Annealing 18%
• Plasmas 16%
• Diodes 16%
• Surface roughness 15%

Physics & Astronomy

• electrical properties 53%
• vacuum deposition 7%
• ultrahigh vacuum 5%
• surface energy 5%
• surface roughness 4%
• atomic force microscopy 4%
• etching 4%
• diodes 4%
• annealing 3%