Control and system design for the Czochralski crystal growth process

M. A. Gevelber, G. Stephanopoulos

Research output: Contribution to conferencePaperpeer-review

1 Scopus citations

Abstract

A controls based approach has been used to improve the Czochralski process. Low order nonlinear models are developed revealing the dominant system dynamics, internal coupling, and the disturbance structure. The models are used to determine the system performance requirements and the performance of alternative inputs and outputs. Based on these considerations, a new control structure is proposed to maintain crystal diameter, interface shape, and thermal gradients throughout the batch growth cycle.

Original languageEnglish (US)
Pages35-40
Number of pages6
StatePublished - Dec 1 1988
Externally publishedYes
EventControl Methods for Manufacturing Processes - Chicago, IL, USA
Duration: Nov 27 1988Dec 2 1988

Other

OtherControl Methods for Manufacturing Processes
CityChicago, IL, USA
Period11/27/8812/2/88

ASJC Scopus subject areas

  • Software
  • Mechanical Engineering

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