Control and system design for the Czochralski crystal growth process

M. A. Gevelber; G. Stephanopoulos

Control and system design for the Czochralski crystal growth process

Research output: Contribution to conference › Paper › peer-review

Abstract

A controls based approach has been used to improve the Czochralski process. Low order nonlinear models are developed revealing the dominant system dynamics, internal coupling, and the disturbance structure. The models are used to determine the system performance requirements and the performance of alternative inputs and outputs. Based on these considerations, a new control structure is proposed to maintain crystal diameter, interface shape, and thermal gradients throughout the batch growth cycle.

Original language	English (US)
Pages	35-40
Number of pages	6
State	Published - Dec 1 1988
Externally published	Yes
Event	Control Methods for Manufacturing Processes - Chicago, IL, USA Duration: Nov 27 1988 → Dec 2 1988

Other

Other	Control Methods for Manufacturing Processes
City	Chicago, IL, USA
Period	11/27/88 → 12/2/88

ASJC Scopus subject areas

Software
Mechanical Engineering

Cite this

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title = "Control and system design for the Czochralski crystal growth process",

abstract = "A controls based approach has been used to improve the Czochralski process. Low order nonlinear models are developed revealing the dominant system dynamics, internal coupling, and the disturbance structure. The models are used to determine the system performance requirements and the performance of alternative inputs and outputs. Based on these considerations, a new control structure is proposed to maintain crystal diameter, interface shape, and thermal gradients throughout the batch growth cycle.",

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year = "1988",

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note = "Control Methods for Manufacturing Processes ; Conference date: 27-11-1988 Through 02-12-1988",

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T1 - Control and system design for the Czochralski crystal growth process

AU - Gevelber, M. A.

AU - Stephanopoulos, G.

PY - 1988/12/1

Y1 - 1988/12/1

N2 - A controls based approach has been used to improve the Czochralski process. Low order nonlinear models are developed revealing the dominant system dynamics, internal coupling, and the disturbance structure. The models are used to determine the system performance requirements and the performance of alternative inputs and outputs. Based on these considerations, a new control structure is proposed to maintain crystal diameter, interface shape, and thermal gradients throughout the batch growth cycle.

AB - A controls based approach has been used to improve the Czochralski process. Low order nonlinear models are developed revealing the dominant system dynamics, internal coupling, and the disturbance structure. The models are used to determine the system performance requirements and the performance of alternative inputs and outputs. Based on these considerations, a new control structure is proposed to maintain crystal diameter, interface shape, and thermal gradients throughout the batch growth cycle.

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M3 - Paper

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T2 - Control Methods for Manufacturing Processes

Y2 - 27 November 1988 through 2 December 1988

ER -

Control and system design for the Czochralski crystal growth process

Abstract

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ASJC Scopus subject areas

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