Composition and structure of boron nitride films deposited by chemical vapor deposition from borazine

John Kouvetakis, V. V. Patel, C. W. Miller, D. B. Beach

Research output: Contribution to journalArticle

42 Citations (Scopus)

Abstract

The composition and structure of boron nitride films prepared by thermal and plasma enhanced chemical vapor deposition (CVD) using borazine as a precursor have been studied. Thermal CVD at temperatures between 475 and 550 °C using either a hot-wall or cold-wall reactor results in amorphous boron-rich films of approximate composition BN0. 67. Plasma enhanced CVD consistently gives films of 1:1 boron to nitrogen stoichiometry, but the hydrogen content of films deposited below 300 °C is so high that the films react with atmospheric moisture. Optimum conditions for the growth of stoichiometric BN with relatively low hydrogen content were found to be low plasma power, hydrogen-borazine gas mixtures, and a substrate temperature of 550 °C. Films deposited under these conditions are mixtures of poorly crystalline hexagonal and cubic boron nitride.

Original languageEnglish (US)
Pages (from-to)3929-3933
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume8
Issue number6
DOIs
StatePublished - 1990
Externally publishedYes

Fingerprint

Boron nitride
boron nitrides
Chemical vapor deposition
vapor deposition
Chemical analysis
Hydrogen
Boron
Plasma enhanced chemical vapor deposition
boron
hydrogen
atmospheric moisture
Plasma Gases
cold walls
Cubic boron nitride
Gas mixtures
Stoichiometry
gas mixtures
boron nitride
borazine
stoichiometry

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Composition and structure of boron nitride films deposited by chemical vapor deposition from borazine. / Kouvetakis, John; Patel, V. V.; Miller, C. W.; Beach, D. B.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 8, No. 6, 1990, p. 3929-3933.

Research output: Contribution to journalArticle

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