Compliant tin-based buffers for the growth of defect-free strained heterostructures on silicon

John Tolle, Radek Roucka, Andrew Chizmeshya, John Kouvetakis, Vijay R. D'Costa, Jose Menendez

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

Abstract

We describe the compliant behavior of Ge 1-ySn y buffer layers grown strain-free on Si(100). Deposition of lattice-mismatched epilayers on these buffers introduces significant strains in both systems. G 1-x-y′, Si xSn y′ and Ge 1-xSi x alloys are deposited on these buffers via reactions of designer hydrides to quantify these strains in detail. X-ray analysis reveals that. Ge 1-x-y′/Ge 1-ySny′/Ge 1-y Sn y and Ge 1-xSi x/Ge 1-ySn y bilayers adopt strain states which minimize their combined elastic energy, as if the films were decoupled from the substrate. Compliant Ge 1-ySn y buffers thereby enable growth of highly mismatched Ge-rich semiconductors on Si and thus facilitate the long-sought on-chip integration of micro- and optoelectronic functions.

Original languageEnglish (US)
Article number252112
JournalApplied Physics Letters
Volume88
Issue number25
DOIs
StatePublished - Jun 19 2006

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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