Codes and standards resource for semiconductor fabrication facilities

Jason D. Hailer, Allan D. Chasey

    Research output: Chapter in Book/Report/Conference proceedingChapter

    Abstract

    The CREATE Codes and Standards Resource for semiconductor facility design, construction, and commissioning is an effort to compile all codes and standards relevant to the semiconductor industry. The CREATE Codes and Standards Resource is designed to easily guide the semiconductor EHS professional through the various codes, standards, and specifications that have a direct impact on the facilities, both in the operations and on the individuals. Links to other known resources, as well as topics that should be considered from an EHS standpoint, are available in a web-based portal for ease of access and for dissemination of the data.

    Original languageEnglish (US)
    Title of host publicationJournal of the IEST
    Pages53-59
    Number of pages7
    Volume45
    EditionSPEC.
    StatePublished - 2002

    Fingerprint

    resources
    Codes (standards)
    Semiconductor materials
    Fabrication
    fabrication
    resource
    semiconductor industry
    World Wide Web
    specifications
    industries
    Specifications
    semiconductor
    code
    Industry

    Keywords

    • Advanced technology facilities
    • Building codes
    • Construction research
    • Environmental safety and health
    • Standards

    ASJC Scopus subject areas

    • Environmental Engineering
    • Environmental Science(all)
    • Environmental Chemistry
    • Instrumentation

    Cite this

    Hailer, J. D., & Chasey, A. D. (2002). Codes and standards resource for semiconductor fabrication facilities. In Journal of the IEST (SPEC. ed., Vol. 45, pp. 53-59)

    Codes and standards resource for semiconductor fabrication facilities. / Hailer, Jason D.; Chasey, Allan D.

    Journal of the IEST. Vol. 45 SPEC. ed. 2002. p. 53-59.

    Research output: Chapter in Book/Report/Conference proceedingChapter

    Hailer, JD & Chasey, AD 2002, Codes and standards resource for semiconductor fabrication facilities. in Journal of the IEST. SPEC. edn, vol. 45, pp. 53-59.
    Hailer JD, Chasey AD. Codes and standards resource for semiconductor fabrication facilities. In Journal of the IEST. SPEC. ed. Vol. 45. 2002. p. 53-59
    Hailer, Jason D. ; Chasey, Allan D. / Codes and standards resource for semiconductor fabrication facilities. Journal of the IEST. Vol. 45 SPEC. ed. 2002. pp. 53-59
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