Codes and standards resource for semiconductor fabrication facilities

Jason D. Hailer, Allan D. Chasey

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

The CREATE Codes and Standards Resource for semiconductor facility design, construction, and commissioning is an effort to compile all codes and standards relevant to the semiconductor industry. The CREATE Codes and Standards Resource is designed to easily guide the semiconductor EHS professional through the various codes, standards, and specifications that have a direct impact on the facilities, both in the operations and on the individuals. Links to other known resources, as well as topics that should be considered from an EHS standpoint, are available in a web-based portal for ease of access and for dissemination of the data.

Original languageEnglish (US)
Title of host publicationJournal of the IEST
Pages53-59
Number of pages7
Volume45
EditionSPEC.
StatePublished - 2002

Fingerprint

resources
Codes (standards)
Semiconductor materials
Fabrication
fabrication
resource
semiconductor industry
World Wide Web
specifications
industries
Specifications
semiconductor
code
Industry

Keywords

  • Advanced technology facilities
  • Building codes
  • Construction research
  • Environmental safety and health
  • Standards

ASJC Scopus subject areas

  • Environmental Engineering
  • Environmental Science(all)
  • Environmental Chemistry
  • Instrumentation

Cite this

Hailer, J. D., & Chasey, A. D. (2002). Codes and standards resource for semiconductor fabrication facilities. In Journal of the IEST (SPEC. ed., Vol. 45, pp. 53-59)

Codes and standards resource for semiconductor fabrication facilities. / Hailer, Jason D.; Chasey, Allan D.

Journal of the IEST. Vol. 45 SPEC. ed. 2002. p. 53-59.

Research output: Chapter in Book/Report/Conference proceedingChapter

Hailer, JD & Chasey, AD 2002, Codes and standards resource for semiconductor fabrication facilities. in Journal of the IEST. SPEC. edn, vol. 45, pp. 53-59.
Hailer JD, Chasey AD. Codes and standards resource for semiconductor fabrication facilities. In Journal of the IEST. SPEC. ed. Vol. 45. 2002. p. 53-59
Hailer, Jason D. ; Chasey, Allan D. / Codes and standards resource for semiconductor fabrication facilities. Journal of the IEST. Vol. 45 SPEC. ed. 2002. pp. 53-59
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