Codes and standards resource for semiconductor fabrication facilities

Jason D. Hailer, Allan D. Chasey

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

The CREATE Codes and Standards Resource for semiconductor facility design, construction, and commissioning is an effort to compile all codes and standards relevant to the semiconductor industry. The CREATE Codes and Standards Resource is designed to easily guide the semiconductor EHS professional through the various codes, standards, and specifications that have a direct impact on the facilities, both in the operations and on the individuals. Links to other known resources, as well as topics that should be considered from an EHS standpoint, are available in a web-based portal for ease of access and for dissemination of the data.

Original languageEnglish (US)
Title of host publicationJournal of the IEST
Pages53-59
Number of pages7
Volume45
EditionSPEC.
StatePublished - 2002

Keywords

  • Advanced technology facilities
  • Building codes
  • Construction research
  • Environmental safety and health
  • Standards

ASJC Scopus subject areas

  • Environmental Engineering
  • Environmental Science(all)
  • Environmental Chemistry
  • Instrumentation

Fingerprint Dive into the research topics of 'Codes and standards resource for semiconductor fabrication facilities'. Together they form a unique fingerprint.

  • Cite this

    Hailer, J. D., & Chasey, A. D. (2002). Codes and standards resource for semiconductor fabrication facilities. In Journal of the IEST (SPEC. ed., Vol. 45, pp. 53-59)