As-S/Ag systems for integrated optics

Michael Kozicki, Y. Khawaja, A. E. Owen, P. J S Ewen, A. Zakery

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

The advantages of the use of metal-chalcogenide systems, and the As-S/Ag system in particular, in integrated optics, are described. The As-S/Ag system has a number of desirable properties which make it attractive for applications in integrated optics, and these are discussed. It is shown that the metal photodissolution effect has an inherently high spatial resolution, well into the submicron range using optical lithography and on the scale of a few tens of nanometers or less with electron-beam exposure. This unusual combination of properties, their easy fabrication in thin- and thick-film form, and the ability to selectively etch either the undoped or doped material make the chalcogenide compounds uniquely appropriate to a variety of applications in integrated optics.

Original languageEnglish (US)
Title of host publicationSixth Int VLSI Multilevel Interconnect Conf
Editors Anon
Place of PublicationPiscataway, NJ, United States
PublisherPubl by IEEE
Pages251-257
Number of pages7
StatePublished - 1989
EventSixth International VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA
Duration: Jun 12 1989Jun 13 1989

Other

OtherSixth International VLSI Multilevel Interconnection Conference
CitySanta Clara, CA, USA
Period6/12/896/13/89

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Kozicki, M., Khawaja, Y., Owen, A. E., Ewen, P. J. S., & Zakery, A. (1989). As-S/Ag systems for integrated optics. In Anon (Ed.), Sixth Int VLSI Multilevel Interconnect Conf (pp. 251-257). Publ by IEEE.