Annealing-induced-type conversion of GaInNAs

Sarah Kurtz, J. F. Geisz, D. J. Friedman, W. K. Metzger, Richard King, N. H. Karam

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

The p-type to n-type conversion induced in the GaInNAs via the in situ annealing processing was studied. The metalorganic chemical vapor deposition (MOCVD) grown p-type gallium compound was found to convert to n-type when annealed at a temperature of 650 °C. The secondary ion mass spectrometric (SIMS) technique show carbon and hydrogen contamination in the compound layers. Annealing in the absence of H was found to reduce the concentration of background acceptors, but was unable to produce an electron concentration of 10 17 cm -3.

Original languageEnglish (US)
Pages (from-to)2505-2508
Number of pages4
JournalJournal of Applied Physics
Volume95
Issue number5
DOIs
StatePublished - Mar 1 2004
Externally publishedYes

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gallium compounds
annealing
metalorganic chemical vapor deposition
contamination
carbon
hydrogen
ions
electrons
temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

Kurtz, S., Geisz, J. F., Friedman, D. J., Metzger, W. K., King, R., & Karam, N. H. (2004). Annealing-induced-type conversion of GaInNAs. Journal of Applied Physics, 95(5), 2505-2508. https://doi.org/10.1063/1.1643775

Annealing-induced-type conversion of GaInNAs. / Kurtz, Sarah; Geisz, J. F.; Friedman, D. J.; Metzger, W. K.; King, Richard; Karam, N. H.

In: Journal of Applied Physics, Vol. 95, No. 5, 01.03.2004, p. 2505-2508.

Research output: Contribution to journalArticle

Kurtz, S, Geisz, JF, Friedman, DJ, Metzger, WK, King, R & Karam, NH 2004, 'Annealing-induced-type conversion of GaInNAs', Journal of Applied Physics, vol. 95, no. 5, pp. 2505-2508. https://doi.org/10.1063/1.1643775
Kurtz S, Geisz JF, Friedman DJ, Metzger WK, King R, Karam NH. Annealing-induced-type conversion of GaInNAs. Journal of Applied Physics. 2004 Mar 1;95(5):2505-2508. https://doi.org/10.1063/1.1643775
Kurtz, Sarah ; Geisz, J. F. ; Friedman, D. J. ; Metzger, W. K. ; King, Richard ; Karam, N. H. / Annealing-induced-type conversion of GaInNAs. In: Journal of Applied Physics. 2004 ; Vol. 95, No. 5. pp. 2505-2508.
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