TY - GEN
T1 - Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz
AU - Pang, Wei
AU - Zhang, Hao
AU - Yu, Hongyu
AU - Kim, Eun Sok
N1 - Funding Information:
The financial support from Government College University Faisalabad and Technical assistance provided by COMSATS University Islamabad (CUI), Lahore and Vehari campus, is greatly acknowledged. The authors are also thankful to the Department of Material Sciences, PIEAS, Islamabad and Department of Metallurgy and Materials Engineering, University of Punjab, Lahore, Pakistan for providing the facility to use high tech. instruments for the research work. Thanks are also extended for Green Engineering Consultants (GEC) for providing moral support to complete this research project.
PY - 2005
Y1 - 2005
N2 - Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient Kt,eff2 on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of Kt,eff2 are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/SixNy) operating around 5GHz with various thicknesses of ZnO and SixNy show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO2 is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.
AB - Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient Kt,eff2 on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of Kt,eff2 are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/SixNy) operating around 5GHz with various thicknesses of ZnO and SixNy show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO2 is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.
KW - FBAR
KW - Mason model
KW - Second harmonic
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U2 - 10.1109/ULTSYM.2005.1603304
DO - 10.1109/ULTSYM.2005.1603304
M3 - Conference contribution
AN - SCOPUS:33847164041
SN - 0780393821
SN - 9780780393820
T3 - Proceedings - IEEE Ultrasonics Symposium
SP - 2136
EP - 2139
BT - 2005 IEEE Ultrasonics Symposium
T2 - 2005 IEEE Ultrasonics Symposium
Y2 - 18 September 2005 through 21 September 2005
ER -