Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz

Wei Pang, Hao Zhang, Hongyu Yu, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Scopus citations

Abstract

Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient Kt,eff2 on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of Kt,eff2 are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/SixNy) operating around 5GHz with various thicknesses of ZnO and SixNy show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO2 is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.

Original languageEnglish (US)
Title of host publication2005 IEEE Ultrasonics Symposium
Pages2136-2139
Number of pages4
DOIs
StatePublished - Dec 1 2005
Event2005 IEEE Ultrasonics Symposium - Rotterdam, Netherlands
Duration: Sep 18 2005Sep 21 2005

Publication series

NameProceedings - IEEE Ultrasonics Symposium
Volume4
ISSN (Print)1051-0117

Other

Other2005 IEEE Ultrasonics Symposium
CountryNetherlands
CityRotterdam
Period9/18/059/21/05

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Keywords

  • FBAR
  • Mason model
  • Second harmonic

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Pang, W., Zhang, H., Yu, H., & Kim, E. S. (2005). Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz. In 2005 IEEE Ultrasonics Symposium (pp. 2136-2139). [1603304] (Proceedings - IEEE Ultrasonics Symposium; Vol. 4). https://doi.org/10.1109/ULTSYM.2005.1603304