@inproceedings{a8a70cfa48194be4a97b9784844c9b72,
title = "Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz",
abstract = "Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient Kt,eff2 on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of Kt,eff2 are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/SixNy) operating around 5GHz with various thicknesses of ZnO and SixNy show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO2 is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.",
keywords = "FBAR, Mason model, Second harmonic",
author = "Wei Pang and Hao Zhang and Hongyu Yu and Kim, {Eun Sok}",
year = "2005",
doi = "10.1109/ULTSYM.2005.1603304",
language = "English (US)",
isbn = "0780393821",
series = "Proceedings - IEEE Ultrasonics Symposium",
pages = "2136--2139",
booktitle = "2005 IEEE Ultrasonics Symposium",
note = "2005 IEEE Ultrasonics Symposium ; Conference date: 18-09-2005 Through 21-09-2005",
}