Abstract
Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient Kt,eff 2 on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of Kt,eff 2 are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/SixNy) operating around 5GHz with various thicknesses of ZnO and SixNy show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO2 is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings - IEEE Ultrasonics Symposium |
| Pages | 2136-2139 |
| Number of pages | 4 |
| Volume | 4 |
| DOIs | |
| State | Published - 2005 |
| Externally published | Yes |
| Event | 2005 IEEE Ultrasonics Symposium - Rotterdam, Netherlands Duration: Sep 18 2005 → Sep 21 2005 |
Other
| Other | 2005 IEEE Ultrasonics Symposium |
|---|---|
| Country | Netherlands |
| City | Rotterdam |
| Period | 9/18/05 → 9/21/05 |
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Keywords
- FBAR
- Mason model
- Second harmonic
ASJC Scopus subject areas
- Engineering(all)
Cite this
Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz. / Pang, Wei; Zhang, Hao; Yu, Hongyu; Kim, Eun Sok.
Proceedings - IEEE Ultrasonics Symposium. Vol. 4 2005. p. 2136-2139 1603304.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz
AU - Pang, Wei
AU - Zhang, Hao
AU - Yu, Hongyu
AU - Kim, Eun Sok
PY - 2005
Y1 - 2005
N2 - Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient Kt,eff 2 on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of Kt,eff 2 are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/SixNy) operating around 5GHz with various thicknesses of ZnO and SixNy show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO2 is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.
AB - Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient Kt,eff 2 on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of Kt,eff 2 are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/SixNy) operating around 5GHz with various thicknesses of ZnO and SixNy show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO2 is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.
KW - FBAR
KW - Mason model
KW - Second harmonic
UR - http://www.scopus.com/inward/record.url?scp=33847164041&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33847164041&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2005.1603304
DO - 10.1109/ULTSYM.2005.1603304
M3 - Conference contribution
SN - 0780393821
SN - 9780780393820
VL - 4
SP - 2136
EP - 2139
BT - Proceedings - IEEE Ultrasonics Symposium
ER -