Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz

Wei Pang, Hao Zhang, Hongyu Yu, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient Kt,eff 2 on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of Kt,eff 2 are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/SixNy) operating around 5GHz with various thicknesses of ZnO and SixNy show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO2 is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.

Original languageEnglish (US)
Title of host publicationProceedings - IEEE Ultrasonics Symposium
Pages2136-2139
Number of pages4
Volume4
DOIs
StatePublished - 2005
Externally publishedYes
Event2005 IEEE Ultrasonics Symposium - Rotterdam, Netherlands
Duration: Sep 18 2005Sep 21 2005

Other

Other2005 IEEE Ultrasonics Symposium
CountryNetherlands
CityRotterdam
Period9/18/059/21/05

Fingerprint

Acoustic wave velocity
Phase noise
Materials properties
Temperature

Keywords

  • FBAR
  • Mason model
  • Second harmonic

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Pang, W., Zhang, H., Yu, H., & Kim, E. S. (2005). Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz. In Proceedings - IEEE Ultrasonics Symposium (Vol. 4, pp. 2136-2139). [1603304] https://doi.org/10.1109/ULTSYM.2005.1603304

Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz. / Pang, Wei; Zhang, Hao; Yu, Hongyu; Kim, Eun Sok.

Proceedings - IEEE Ultrasonics Symposium. Vol. 4 2005. p. 2136-2139 1603304.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pang, W, Zhang, H, Yu, H & Kim, ES 2005, Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz. in Proceedings - IEEE Ultrasonics Symposium. vol. 4, 1603304, pp. 2136-2139, 2005 IEEE Ultrasonics Symposium, Rotterdam, Netherlands, 9/18/05. https://doi.org/10.1109/ULTSYM.2005.1603304
Pang W, Zhang H, Yu H, Kim ES. Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz. In Proceedings - IEEE Ultrasonics Symposium. Vol. 4. 2005. p. 2136-2139. 1603304 https://doi.org/10.1109/ULTSYM.2005.1603304
Pang, Wei ; Zhang, Hao ; Yu, Hongyu ; Kim, Eun Sok. / Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz. Proceedings - IEEE Ultrasonics Symposium. Vol. 4 2005. pp. 2136-2139
@inproceedings{a8a70cfa48194be4a97b9784844c9b72,
title = "Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz",
abstract = "Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient Kt,eff 2 on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of Kt,eff 2 are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/SixNy) operating around 5GHz with various thicknesses of ZnO and SixNy show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO2 is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.",
keywords = "FBAR, Mason model, Second harmonic",
author = "Wei Pang and Hao Zhang and Hongyu Yu and Kim, {Eun Sok}",
year = "2005",
doi = "10.1109/ULTSYM.2005.1603304",
language = "English (US)",
isbn = "0780393821",
volume = "4",
pages = "2136--2139",
booktitle = "Proceedings - IEEE Ultrasonics Symposium",

}

TY - GEN

T1 - Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz

AU - Pang, Wei

AU - Zhang, Hao

AU - Yu, Hongyu

AU - Kim, Eun Sok

PY - 2005

Y1 - 2005

N2 - Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient Kt,eff 2 on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of Kt,eff 2 are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/SixNy) operating around 5GHz with various thicknesses of ZnO and SixNy show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO2 is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.

AB - Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient Kt,eff 2 on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of Kt,eff 2 are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/SixNy) operating around 5GHz with various thicknesses of ZnO and SixNy show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO2 is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.

KW - FBAR

KW - Mason model

KW - Second harmonic

UR - http://www.scopus.com/inward/record.url?scp=33847164041&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33847164041&partnerID=8YFLogxK

U2 - 10.1109/ULTSYM.2005.1603304

DO - 10.1109/ULTSYM.2005.1603304

M3 - Conference contribution

SN - 0780393821

SN - 9780780393820

VL - 4

SP - 2136

EP - 2139

BT - Proceedings - IEEE Ultrasonics Symposium

ER -