Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz

Wei Pang; Hao Zhang; Hongyu Yu; Eun Sok Kim

doi:10.1109/ULTSYM.2005.1603304

Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz

Wei Pang, Hao Zhang, Hongyu Yu, Eun Sok Kim

Arizona State University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

8 Scopus citations

Abstract

Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient K_t,eff² on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of K_t,eff² are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/Si_xN_y) operating around 5GHz with various thicknesses of ZnO and Si_xN_y show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO₂ is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.

Original language	English (US)
Title of host publication	2005 IEEE Ultrasonics Symposium
Pages	2136-2139
Number of pages	4
DOIs	https://doi.org/10.1109/ULTSYM.2005.1603304
State	Published - 2005
Event	2005 IEEE Ultrasonics Symposium - Rotterdam, Netherlands Duration: Sep 18 2005 → Sep 21 2005

Publication series

Name	Proceedings - IEEE Ultrasonics Symposium
Volume	4
ISSN (Print)	1051-0117

Other

Other	2005 IEEE Ultrasonics Symposium
Country	Netherlands
City	Rotterdam
Period	9/18/05 → 9/21/05

Keywords

FBAR
Mason model
Second harmonic

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2005.1603304

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Pang, W, Zhang, H, Yu, H & Kim, ES 2005, Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz. in 2005 IEEE Ultrasonics Symposium., 1603304, Proceedings - IEEE Ultrasonics Symposium, vol. 4, pp. 2136-2139, 2005 IEEE Ultrasonics Symposium, Rotterdam, Netherlands, 9/18/05. https://doi.org/10.1109/ULTSYM.2005.1603304

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title = "Analytical and experimental study on second harmonic response of FBAR for oscillator applications above 2GHz",

abstract = "Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient Kt,eff2 on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of Kt,eff2 are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/SixNy) operating around 5GHz with various thicknesses of ZnO and SixNy show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO2 is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.",

keywords = "FBAR, Mason model, Second harmonic",

author = "Wei Pang and Hao Zhang and Hongyu Yu and Kim, {Eun Sok}",

year = "2005",

doi = "10.1109/ULTSYM.2005.1603304",

language = "English (US)",

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series = "Proceedings - IEEE Ultrasonics Symposium",

pages = "2136--2139",

booktitle = "2005 IEEE Ultrasonics Symposium",

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AU - Pang, Wei

AU - Zhang, Hao

AU - Yu, Hongyu

AU - Kim, Eun Sok

PY - 2005

Y1 - 2005

N2 - Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient Kt,eff2 on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of Kt,eff2 are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/SixNy) operating around 5GHz with various thicknesses of ZnO and SixNy show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO2 is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.

AB - Mason model is employed to investigate the second harmonic response of FBAR composed of three and four layers, particularly the dependence of the effective coupling coefficient Kt,eff2 on material properties. The simulation results for both ZnO and A1N based FBARs reveal that the maximum values of Kt,eff2 are obtained with a thickness ratio (between the piezoelectric layer and non-piezoelectric layer) that is close to its acoustic velocity ratio. Experimental results on FBAR samples (Al/ZnO/Al/SixNy) operating around 5GHz with various thicknesses of ZnO and SixNy show good agreement with the numerical modeling. A low phase noise, temperature stable 4.9GHz oscillator based on an FBAR consisting of Al/ZnO/Al/SiO2 is demonstrated as an example for the potential use of the second harmonic operation above 2GHz.

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KW - Mason model

KW - Second harmonic

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