Abstract
An adaptive Mode Predictive Controller is applied to the optimization and control of reentrant semiconductor manufacturing lines. It is implemented within a three-layer hierarchical structure. At the top layer the parameters of an aggregated model are obtained on-line while at the intermediate layer production optimization and inventory control are performed using these parameters. The bottom layer consists of a discrete event `follow-up' controller which tracks the targets issued by the optimizer. This controller is applied to a discrete-event semiconductor manufacturing line problem whose specifications were developed by Intel Corp.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of the American Control Conference |
| Publisher | IEEE |
| Pages | 4087-4091 |
| Number of pages | 5 |
| Volume | 6 |
| State | Published - 1999 |
| Event | Proceedings of the 1999 American Control Conference (99ACC) - San Diego, CA, USA Duration: Jun 2 1999 → Jun 4 1999 |
Other
| Other | Proceedings of the 1999 American Control Conference (99ACC) |
|---|---|
| City | San Diego, CA, USA |
| Period | 6/2/99 → 6/4/99 |
ASJC Scopus subject areas
- Control and Systems Engineering