Acoustic ejector with novel lens employing air-reflectors

Chuang Yuan Lee, Hongyu Yu, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

40 Scopus citations

Abstract

This paper describes a novel droplet ejector with an acoustic lens employing air-reflectors. The lens focuses the acoustic beams at the liquid surface, and facilitates uniform and consistent droplet ejections. This acoustic ejector requires no nozzle, nor heat for actuation, but uses a novel lens. When excited with RF pulses (7 μs pulsewidth) of 18 MHz (corresponding to the fundamental thickness-mode resonant frequency), the ejector ejects uniform droplets of 70|μm in diameter at a rate up to 10 kHz. The ejector is integrated with reservoirs and channels on a single chip, and is shown to produce continuous and stable ejections without any liquid refilling or frequency tuning.

Original languageEnglish (US)
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages170-173
Number of pages4
StatePublished - 2006
Externally publishedYes
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: Jan 22 2006Jan 26 2006

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
Country/TerritoryTurkey
CityIstanbul
Period1/22/061/26/06

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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