Reflection high-energy electron diffraction oscillation frequencies are determined by measuring the width of the specular spot perpendicular to the surface during substrate rotation. Substrate rotation and data acquisition are phase locked to obtain exact rotation frequencies, allowing the inclusion of satellite peaks in the measurement. The method has a typical accuracy of well below 1% and provides a practical means to measure growth rates on rotating substrates.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)