Accurate growth rate determination on rotating substrates using electron diffraction dynamics

W. Braun, H. Möller, Yong-Hang Zhang

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Reflection high-energy electron diffraction oscillation frequencies are determined by measuring the width of the specular spot perpendicular to the surface during substrate rotation. Substrate rotation and data acquisition are phase locked to obtain exact rotation frequencies, allowing the inclusion of satellite peaks in the measurement. The method has a typical accuracy of well below 1% and provides a practical means to measure growth rates on rotating substrates.

Original languageEnglish (US)
Pages (from-to)138-140
Number of pages3
JournalApplied Physics Letters
Volume74
Issue number1
DOIs
StatePublished - 1999

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electron diffraction
high energy electrons
data acquisition
acquisition
inclusions
oscillations

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Accurate growth rate determination on rotating substrates using electron diffraction dynamics. / Braun, W.; Möller, H.; Zhang, Yong-Hang.

In: Applied Physics Letters, Vol. 74, No. 1, 1999, p. 138-140.

Research output: Contribution to journalArticle

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