A time series approach for compensating for errors in complex gauge systems

James D. Stanley, Daniel R. Mccarville, Douglas Montgomery

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Monitoring, control and improvement of measurement systems performance are an important aspect of process and quality engineering. Gauge and measurement systems capability studies are often used to estimate the inherent variability of error in the gauge. Control charts of measurement error and periodic calibration activities can be employed to keep these systems operating properly. We describe and illustrate the use of a time series model to further improve gauge performance. The model is used to represent non-independent structure in the time series of measurement bias errors. Adjustments to actual process measurements are then based on the estimates of bias error from the model. The technique is applied to a measurement system used in semiconductor manufacturing, resulting in a reduction in the magnitude of measurement error of approximately 40%.

Original languageEnglish (US)
Pages (from-to)273-280
Number of pages8
JournalQuality and Reliability Engineering International
Volume14
Issue number4
StatePublished - Aug 1998

Fingerprint

Gages
Time series
Measurement errors
Complex systems
Calibration
Semiconductor materials
Monitoring
Measurement system
Measurement error
Semiconductor manufacturing
Control charts
Measurement bias
Quality engineering
Performance measurement system
Time series models

Keywords

  • Autocorrelated errors
  • Gauge bias
  • Gauge error
  • Semiconductor testing
  • Time series models

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Management Science and Operations Research

Cite this

A time series approach for compensating for errors in complex gauge systems. / Stanley, James D.; Mccarville, Daniel R.; Montgomery, Douglas.

In: Quality and Reliability Engineering International, Vol. 14, No. 4, 08.1998, p. 273-280.

Research output: Contribution to journalArticle

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