A survey of problems, solution techniques, and future challenges in scheduling semiconductor manufacturing operations

Lars Mönch, John Fowler, Stéphane Dauzère-Pérès, Scott J. Mason, Oliver Rose

Research output: Contribution to journalArticle

203 Scopus citations

Abstract

In this paper, we discuss scheduling problems in semiconductor manufacturing. Starting from describing the manufacturing process, we identify typical scheduling problems found in semiconductor manufacturing systems. We describe batch scheduling problems, parallel machine scheduling problems, job shop scheduling problems, scheduling problems with auxiliary resources, multiple orders per job scheduling problems, and scheduling problems related to cluster tools. We also present important solution techniques that are used to solve these scheduling problems by means of specific examples, and report on known implementations. Finally, we summarize some of the challenges in scheduling semiconductor manufacturing operations.

Original languageEnglish (US)
Pages (from-to)583-599
Number of pages17
JournalJournal of Scheduling
Volume14
Issue number6
DOIs
StatePublished - Dec 1 2011

Keywords

  • Scheduling
  • Semiconductor manufacturing
  • Survey

ASJC Scopus subject areas

  • Software
  • Engineering(all)
  • Management Science and Operations Research
  • Artificial Intelligence

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