A study of small electron probe formation in a field emission gun TEM/STEM

J. K. Weiss; Ray Carpenter; A. A. Higgs

doi:10.1016/0304-3991(91)90124-O

A study of small electron probe formation in a field emission gun TEM/STEM

J. K. Weiss, Ray Carpenter, A. A. Higgs

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7 Scopus citations

Abstract

The optics of the illuminating system of a TEM/STEM equipped with a high-brightness field emission source has been studied in order to determine the current density distributions of small electron probes used for microanalysis. The experimental distributions were measured from high-magnification TEM images of the small probes, and compared to theoretical distributions calculated using both coherent and incoherent optics. The microscope was shown to be capable of producing an electron probe with a FWHM diameter of 1.7 nm and a current of 1 nA. The size of the probe is limited by electrical and mechanical instabilities.

Original language	English (US)
Pages (from-to)	319-329
Number of pages	11
Journal	Ultramicroscopy
Volume	36
Issue number	4
DOIs	https://doi.org/10.1016/0304-3991(91)90124-O
State	Published - Sep 1991

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Instrumentation

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10.1016/0304-3991(91)90124-O

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title = "A study of small electron probe formation in a field emission gun TEM/STEM",

abstract = "The optics of the illuminating system of a TEM/STEM equipped with a high-brightness field emission source has been studied in order to determine the current density distributions of small electron probes used for microanalysis. The experimental distributions were measured from high-magnification TEM images of the small probes, and compared to theoretical distributions calculated using both coherent and incoherent optics. The microscope was shown to be capable of producing an electron probe with a FWHM diameter of 1.7 nm and a current of 1 nA. The size of the probe is limited by electrical and mechanical instabilities.",

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AU - Carpenter, Ray

AU - Higgs, A. A.

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N2 - The optics of the illuminating system of a TEM/STEM equipped with a high-brightness field emission source has been studied in order to determine the current density distributions of small electron probes used for microanalysis. The experimental distributions were measured from high-magnification TEM images of the small probes, and compared to theoretical distributions calculated using both coherent and incoherent optics. The microscope was shown to be capable of producing an electron probe with a FWHM diameter of 1.7 nm and a current of 1 nA. The size of the probe is limited by electrical and mechanical instabilities.

AB - The optics of the illuminating system of a TEM/STEM equipped with a high-brightness field emission source has been studied in order to determine the current density distributions of small electron probes used for microanalysis. The experimental distributions were measured from high-magnification TEM images of the small probes, and compared to theoretical distributions calculated using both coherent and incoherent optics. The microscope was shown to be capable of producing an electron probe with a FWHM diameter of 1.7 nm and a current of 1 nA. The size of the probe is limited by electrical and mechanical instabilities.

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JO - Ultramicroscopy

JF - Ultramicroscopy

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A study of small electron probe formation in a field emission gun TEM/STEM

Abstract

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