A package for fast finite element method based simulation of X-ray diffraction from nano-structures

Eugen Wintersberger, Jay Oswald

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this work a novel package for the calculation of the diffracted intensity from nano-structures based on finite element simulations is presented. Besides a short introduction into the algorithm which we have developed two examples namely the diffraction from Si/SiGe systems with ripples and quantum dots with dislocations are shown.

Original languageEnglish (US)
Title of host publicationNanoscale Pattern Formation
Pages60-65
Number of pages6
StatePublished - Oct 15 2010
Externally publishedYes
Event2009 MRS Fall Meeting - Boston, MA, United States
Duration: Nov 30 2009Dec 4 2009

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1228
ISSN (Print)0272-9172

Other

Other2009 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period11/30/0912/4/09

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Wintersberger, E., & Oswald, J. (2010). A package for fast finite element method based simulation of X-ray diffraction from nano-structures. In Nanoscale Pattern Formation (pp. 60-65). (Materials Research Society Symposium Proceedings; Vol. 1228).