A package for fast finite element method based simulation of X-ray diffraction from nano-structures

Eugen Wintersberger; Jay Oswald

A package for fast finite element method based simulation of X-ray diffraction from nano-structures

Eugen Wintersberger, Jay Oswald

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this work a novel package for the calculation of the diffracted intensity from nano-structures based on finite element simulations is presented. Besides a short introduction into the algorithm which we have developed two examples namely the diffraction from Si/SiGe systems with ripples and quantum dots with dislocations are shown.

Original language	English (US)
Title of host publication	Nanoscale Pattern Formation
Pages	60-65
Number of pages	6
State	Published - 2010
Externally published	Yes
Event	2009 MRS Fall Meeting - Boston, MA, United States Duration: Nov 30 2009 → Dec 4 2009

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	1228
ISSN (Print)	0272-9172

Other

Other	2009 MRS Fall Meeting
Country/Territory	United States
City	Boston, MA
Period	11/30/09 → 12/4/09

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

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title = "A package for fast finite element method based simulation of X-ray diffraction from nano-structures",

abstract = "In this work a novel package for the calculation of the diffracted intensity from nano-structures based on finite element simulations is presented. Besides a short introduction into the algorithm which we have developed two examples namely the diffraction from Si/SiGe systems with ripples and quantum dots with dislocations are shown.",

author = "Eugen Wintersberger and Jay Oswald",

year = "2010",

language = "English (US)",

isbn = "9781617387593",

series = "Materials Research Society Symposium Proceedings",

pages = "60--65",

booktitle = "Nanoscale Pattern Formation",

note = "2009 MRS Fall Meeting ; Conference date: 30-11-2009 Through 04-12-2009",

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AU - Oswald, Jay

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N2 - In this work a novel package for the calculation of the diffracted intensity from nano-structures based on finite element simulations is presented. Besides a short introduction into the algorithm which we have developed two examples namely the diffraction from Si/SiGe systems with ripples and quantum dots with dislocations are shown.

AB - In this work a novel package for the calculation of the diffracted intensity from nano-structures based on finite element simulations is presented. Besides a short introduction into the algorithm which we have developed two examples namely the diffraction from Si/SiGe systems with ripples and quantum dots with dislocations are shown.

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M3 - Conference contribution

AN - SCOPUS:77957774560

SN - 9781617387593

T3 - Materials Research Society Symposium Proceedings

SP - 60

EP - 65

BT - Nanoscale Pattern Formation

T2 - 2009 MRS Fall Meeting

Y2 - 30 November 2009 through 4 December 2009

ER -

A package for fast finite element method based simulation of X-ray diffraction from nano-structures

Abstract

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ASJC Scopus subject areas

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