A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers

Haluk Kulah, Junseok Chae, Navid Yazdi, Khalil Najafi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

34 Citations (Scopus)

Abstract

A multi-step electromechanical ΣΔ modulator for μg accelerometers is described. A two-element sensor array is used in two ΣΔ loops and resolution improves by >2x compared to a conventional 2nd-order ΣΔ modulator. This CMOS chip operates at 1MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.

Original languageEnglish (US)
Title of host publicationDigest of Technical Papers - IEEE International Solid-State Circuits Conference
EditorsL.C. Fujino, A. Grabel, D. Jeager, K.C. Smith
StatePublished - 2003
Externally publishedYes
Event2003 Digest of Technical Papers - , United States
Duration: Feb 9 2003Feb 13 2003

Other

Other2003 Digest of Technical Papers
CountryUnited States
Period2/9/032/13/03

Fingerprint

Accelerometers
Modulators
Sensor arrays

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture

Cite this

Kulah, H., Chae, J., Yazdi, N., & Najafi, K. (2003). A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers. In L. C. Fujino, A. Grabel, D. Jeager, & K. C. Smith (Eds.), Digest of Technical Papers - IEEE International Solid-State Circuits Conference

A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers. / Kulah, Haluk; Chae, Junseok; Yazdi, Navid; Najafi, Khalil.

Digest of Technical Papers - IEEE International Solid-State Circuits Conference. ed. / L.C. Fujino; A. Grabel; D. Jeager; K.C. Smith. 2003.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kulah, H, Chae, J, Yazdi, N & Najafi, K 2003, A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers. in LC Fujino, A Grabel, D Jeager & KC Smith (eds), Digest of Technical Papers - IEEE International Solid-State Circuits Conference. 2003 Digest of Technical Papers, United States, 2/9/03.
Kulah H, Chae J, Yazdi N, Najafi K. A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers. In Fujino LC, Grabel A, Jeager D, Smith KC, editors, Digest of Technical Papers - IEEE International Solid-State Circuits Conference. 2003
Kulah, Haluk ; Chae, Junseok ; Yazdi, Navid ; Najafi, Khalil. / A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers. Digest of Technical Papers - IEEE International Solid-State Circuits Conference. editor / L.C. Fujino ; A. Grabel ; D. Jeager ; K.C. Smith. 2003.
@inproceedings{7ab19c53e6c941b5986e6c62babae48a,
title = "A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers",
abstract = "A multi-step electromechanical ΣΔ modulator for μg accelerometers is described. A two-element sensor array is used in two ΣΔ loops and resolution improves by >2x compared to a conventional 2nd-order ΣΔ modulator. This CMOS chip operates at 1MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.",
author = "Haluk Kulah and Junseok Chae and Navid Yazdi and Khalil Najafi",
year = "2003",
language = "English (US)",
editor = "L.C. Fujino and A. Grabel and D. Jeager and K.C. Smith",
booktitle = "Digest of Technical Papers - IEEE International Solid-State Circuits Conference",

}

TY - GEN

T1 - A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers

AU - Kulah, Haluk

AU - Chae, Junseok

AU - Yazdi, Navid

AU - Najafi, Khalil

PY - 2003

Y1 - 2003

N2 - A multi-step electromechanical ΣΔ modulator for μg accelerometers is described. A two-element sensor array is used in two ΣΔ loops and resolution improves by >2x compared to a conventional 2nd-order ΣΔ modulator. This CMOS chip operates at 1MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.

AB - A multi-step electromechanical ΣΔ modulator for μg accelerometers is described. A two-element sensor array is used in two ΣΔ loops and resolution improves by >2x compared to a conventional 2nd-order ΣΔ modulator. This CMOS chip operates at 1MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.

UR - http://www.scopus.com/inward/record.url?scp=0037630925&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037630925&partnerID=8YFLogxK

M3 - Conference contribution

BT - Digest of Technical Papers - IEEE International Solid-State Circuits Conference

A2 - Fujino, L.C.

A2 - Grabel, A.

A2 - Jeager, D.

A2 - Smith, K.C.

ER -