Abstract
A multi-step electromechanical ΣΔ modulator for μg accelerometers is described. A two-element sensor array is used in two ΣΔ loops and resolution improves by >2x compared to a conventional 2nd-order ΣΔ modulator. This CMOS chip operates at 1MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.
Original language | English (US) |
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Title of host publication | Digest of Technical Papers - IEEE International Solid-State Circuits Conference |
Editors | L.C. Fujino, A. Grabel, D. Jeager, K.C. Smith |
State | Published - 2003 |
Externally published | Yes |
Event | 2003 Digest of Technical Papers - , United States Duration: Feb 9 2003 → Feb 13 2003 |
Other
Other | 2003 Digest of Technical Papers |
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Country/Territory | United States |
Period | 2/9/03 → 2/13/03 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Hardware and Architecture