A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers

Haluk Kulah, Junseok Chae, Navid Yazdi, Khalil Najafi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

33 Scopus citations

Abstract

A multi-step electromechanical ΣΔ modulator for μg accelerometers is described. A two-element sensor array is used in two ΣΔ loops and resolution improves by >2x compared to a conventional 2nd-order ΣΔ modulator. This CMOS chip operates at 1MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.

Original languageEnglish (US)
Title of host publicationDigest of Technical Papers - IEEE International Solid-State Circuits Conference
EditorsL.C. Fujino, A. Grabel, D. Jeager, K.C. Smith
StatePublished - 2003
Externally publishedYes
Event2003 Digest of Technical Papers - , United States
Duration: Feb 9 2003Feb 13 2003

Other

Other2003 Digest of Technical Papers
CountryUnited States
Period2/9/032/13/03

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture

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    Kulah, H., Chae, J., Yazdi, N., & Najafi, K. (2003). A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers. In L. C. Fujino, A. Grabel, D. Jeager, & K. C. Smith (Eds.), Digest of Technical Papers - IEEE International Solid-State Circuits Conference