This letter reports an acoustic resonator of high quality factors (Qs) operating in liquid media. The film bulk acoustic resonator (FBAR) is made of a ring-shaped piezoelectric aluminum nitride thin film, and is excited in a contour mode. By having a low motional resistance upon coupling with liquids, the contour mode FBAR achieved Qs up to 189, more than 12× over the state-of-the-art FBARs in liquids. The resonator was characterized by an aptamer-thrombin binding pair for a biosensor and showed a mass resolution of 1.78 ng/ cm2.

Original languageEnglish (US)
Article number053703
JournalApplied Physics Letters
Issue number5
StatePublished - Feb 17 2010

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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