A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

Wencheng Xu; Seokheun Choi; Junseok Chae

doi:10.1063/1.3309586

A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

Wencheng Xu, Seokheun Choi, Junseok Chae

Research output: Contribution to journal › Article › peer-review

65 Scopus citations

Abstract

This letter reports an acoustic resonator of high quality factors (Qs) operating in liquid media. The film bulk acoustic resonator (FBAR) is made of a ring-shaped piezoelectric aluminum nitride thin film, and is excited in a contour mode. By having a low motional resistance upon coupling with liquids, the contour mode FBAR achieved Qs up to 189, more than 12× over the state-of-the-art FBARs in liquids. The resonator was characterized by an aptamer-thrombin binding pair for a biosensor and showed a mass resolution of 1.78 ng/ cm².

Original language	English (US)
Article number	053703
Journal	Applied Physics Letters
Volume	96
Issue number	5
DOIs	https://doi.org/10.1063/1.3309586
State	Published - 2010

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.3309586

Cite this

@article{bf83ac137fad4538a15b0335b177e69e,

title = "A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications",

abstract = "This letter reports an acoustic resonator of high quality factors (Qs) operating in liquid media. The film bulk acoustic resonator (FBAR) is made of a ring-shaped piezoelectric aluminum nitride thin film, and is excited in a contour mode. By having a low motional resistance upon coupling with liquids, the contour mode FBAR achieved Qs up to 189, more than 12× over the state-of-the-art FBARs in liquids. The resonator was characterized by an aptamer-thrombin binding pair for a biosensor and showed a mass resolution of 1.78 ng/ cm2.",

author = "Wencheng Xu and Seokheun Choi and Junseok Chae",

note = "Funding Information: This work was supported by National Science Foundation under Grant No. 741834. The authors would like to thank Mr. Xu Zhang for his assistance in the measurements.",

year = "2010",

doi = "10.1063/1.3309586",

language = "English (US)",

volume = "96",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "5",

}

TY - JOUR

T1 - A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

AU - Xu, Wencheng

AU - Choi, Seokheun

AU - Chae, Junseok

N1 - Funding Information: This work was supported by National Science Foundation under Grant No. 741834. The authors would like to thank Mr. Xu Zhang for his assistance in the measurements.

PY - 2010

Y1 - 2010

N2 - This letter reports an acoustic resonator of high quality factors (Qs) operating in liquid media. The film bulk acoustic resonator (FBAR) is made of a ring-shaped piezoelectric aluminum nitride thin film, and is excited in a contour mode. By having a low motional resistance upon coupling with liquids, the contour mode FBAR achieved Qs up to 189, more than 12× over the state-of-the-art FBARs in liquids. The resonator was characterized by an aptamer-thrombin binding pair for a biosensor and showed a mass resolution of 1.78 ng/ cm2.

AB - This letter reports an acoustic resonator of high quality factors (Qs) operating in liquid media. The film bulk acoustic resonator (FBAR) is made of a ring-shaped piezoelectric aluminum nitride thin film, and is excited in a contour mode. By having a low motional resistance upon coupling with liquids, the contour mode FBAR achieved Qs up to 189, more than 12× over the state-of-the-art FBARs in liquids. The resonator was characterized by an aptamer-thrombin binding pair for a biosensor and showed a mass resolution of 1.78 ng/ cm2.

UR - http://www.scopus.com/inward/record.url?scp=76449104416&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=76449104416&partnerID=8YFLogxK

U2 - 10.1063/1.3309586

DO - 10.1063/1.3309586

M3 - Article

AN - SCOPUS:76449104416

SN - 0003-6951

VL - 96

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 5

M1 - 053703

ER -

A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this