Abstract

This letter reports an acoustic resonator of high quality factors (Qs) operating in liquid media. The film bulk acoustic resonator (FBAR) is made of a ring-shaped piezoelectric aluminum nitride thin film, and is excited in a contour mode. By having a low motional resistance upon coupling with liquids, the contour mode FBAR achieved Qs up to 189, more than 12× over the state-of-the-art FBARs in liquids. The resonator was characterized by an aptamer-thrombin binding pair for a biosensor and showed a mass resolution of 1.78 ng/ cm2.

Original languageEnglish (US)
Article number053703
JournalApplied Physics Letters
Volume96
Issue number5
DOIs
StatePublished - 2010

Fingerprint

Q factors
resonators
acoustics
liquids
thrombin
aluminum nitrides
low resistance
bioinstrumentation
rings
thin films

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications. / Xu, Wencheng; Choi, Seokheun; Chae, Junseok.

In: Applied Physics Letters, Vol. 96, No. 5, 053703, 2010.

Research output: Contribution to journalArticle

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