A combined dispatching criteria approach to scheduling semiconductor manufacturing systems

Russ M. Dabbas, Hung Nan Chen, John Fowler, Dan Shunk

Research output: Contribution to journalArticle

66 Scopus citations

Abstract

The scheduling problem of semiconductor manufacturing systems has multiple responses of interest. The objective is to simultaneously optimize these different responses or to find the best-compromised solution. Most previous research in the area of semiconductor manufacturing systems has focused on optimizing a single performance measure. Dabbas and Fowler proposed a modified dispatching approach that combines multiple dispatching criteria into a single rule with the objective of simultaneously optimizing multiple objectives. In this paper, we validate their proposed approach using two different fab models at different levels of complexity: a hypothetical six stage-five machines Mini-Fab model and a full scale wafer fab model adapted from an actual Motorola wafer fab. We also discuss the actual implementation of the proposed dispatching algorithm into a scheduler for daily operation at a Motorola wafer fabrication facility. Results show an average 20% improvement for all responses when using the proposed dispatching approach.

Original languageEnglish (US)
Pages (from-to)307-324
Number of pages18
JournalComputers and Industrial Engineering
Volume39
Issue number3-4
DOIs
StatePublished - Apr 1 2001

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Keywords

  • Design of experiments
  • Desirability functions
  • Discrete event simulation
  • Dispatching
  • Response surface optimization
  • Semiconductor wafer fab scheduling

ASJC Scopus subject areas

  • Computer Science(all)
  • Engineering(all)

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