A combined dispatching criteria approach to scheduling semiconductor manufacturing systems

Russ M. Dabbas, Hung Nan Chen, John Fowler, Dan Shunk

Research output: Contribution to journalArticlepeer-review

53 Scopus citations


The scheduling problem of semiconductor manufacturing systems has multiple responses of interest. The objective is to simultaneously optimize these different responses or to find the best-compromised solution. Most previous research in the area of semiconductor manufacturing systems has focused on optimizing a single performance measure. Dabbas and Fowler proposed a modified dispatching approach that combines multiple dispatching criteria into a single rule with the objective of simultaneously optimizing multiple objectives. In this paper, we validate their proposed approach using two different fab models at different levels of complexity: a hypothetical six stage-five machines Mini-Fab model and a full scale wafer fab model adapted from an actual Motorola wafer fab. We also discuss the actual implementation of the proposed dispatching algorithm into a scheduler for daily operation at a Motorola wafer fabrication facility. Results show an average 20% improvement for all responses when using the proposed dispatching approach.

Original languageEnglish (US)
Pages (from-to)307-324
Number of pages18
JournalComputers and Industrial Engineering
Issue number3-4
StatePublished - Apr 2001


  • Design of experiments
  • Desirability functions
  • Discrete event simulation
  • Dispatching
  • Response surface optimization
  • Semiconductor wafer fab scheduling

ASJC Scopus subject areas

  • Computer Science(all)
  • Engineering(all)


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