100-nm thick single-phase wurtzite BAlN films with boron contents over 10%

Xiaohang Li, Shuo Wang, Hanxiao Liu, Fernando A. Ponce, Theeradetch Detchprohm, Russell D. Dupuis

Research output: Contribution to journalArticle

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Abstract

Growing thicker BAlN films while maintaining single-phase wurtzite structure and boron content over 10% has been challenging. In this study, we report on the growth of 100 nm-thick single-phase wurtzite BAlN films with boron contents up to 14.4% by MOCVD. Flow-modulated epitaxy was employed to increase diffusion length of group-III atoms and reduce parasitic reactions between the metalorganics and NH3. A large growth efficiency of ∼2000 μm mol−1 was achieved as a result. Small B/III ratios up to 17% in conjunction with high temperatures up to 1010 °C were utilized to prevent formation of the cubic phase and maintain wurtzite structure.

LanguageEnglish (US)
Article number1600699
JournalPhysica Status Solidi (B) Basic Research
Volume254
Issue number8
DOIs
StatePublished - Aug 1 2017
Externally publishedYes

Fingerprint

Boron
wurtzite
boron
Metallorganic chemical vapor deposition
Phase structure
Epitaxial growth
Thick films
diffusion length
Atoms
epitaxy
thick films
metalorganic chemical vapor deposition
Temperature
atoms

Keywords

  • BAlN
  • boron
  • MOCVD
  • phases
  • wurtzite

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

100-nm thick single-phase wurtzite BAlN films with boron contents over 10%. / Li, Xiaohang; Wang, Shuo; Liu, Hanxiao; Ponce, Fernando A.; Detchprohm, Theeradetch; Dupuis, Russell D.

In: Physica Status Solidi (B) Basic Research, Vol. 254, No. 8, 1600699, 01.08.2017.

Research output: Contribution to journalArticle

Li X, Wang S, Liu H, Ponce FA, Detchprohm T, Dupuis RD. 100-nm thick single-phase wurtzite BAlN films with boron contents over 10%. Physica Status Solidi (B) Basic Research. 2017 Aug 1;254(8). 1600699. Available from, DOI: 10.1002/pssb.201600699
Li, Xiaohang ; Wang, Shuo ; Liu, Hanxiao ; Ponce, Fernando A. ; Detchprohm, Theeradetch ; Dupuis, Russell D./ 100-nm thick single-phase wurtzite BAlN films with boron contents over 10%. In: Physica Status Solidi (B) Basic Research. 2017 ; Vol. 254, No. 8.
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AU - Detchprohm,Theeradetch

AU - Dupuis,Russell D.

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